Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5121449 | Information detecting system of scanning type | Masataka Shiba, Ryuichi Funatsu, Minoru Tanaka, Akira Inagaki | 1992-06-09 |
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Ryuichi Funatsu, Yukio Kembo | 1989-07-25 |
| 4803712 | X-ray exposure system | Yukio Kembo, Minoru Ikeda | 1989-02-07 |
| 4666291 | Light-exposure apparatus | Asahiro Kuni, Ryuichi Funatsu, Yukio Kembo, Akira Inagaki | 1987-05-19 |
| 4516254 | X-Ray lithographic apparatus | Yoshihiro Komeyama | 1985-05-07 |
| 4492356 | Precision parallel translation system | Minoru Ikeda, Yoshihiro Komeyama | 1985-01-08 |
| 4475223 | Exposure process and system | Mitsuyoshi Koizumi, Nobuyuki Akiyama, Yukio Kembo, Minoru Ikeda | 1984-10-02 |
| 4403336 | X-Ray exposure apparatus | Minoru Ikeda, Nobuyuki Akiyama | 1983-09-06 |