Issued Patents All Time
Showing 1–25 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417262 | Scanning probe microscope and sample observation method using same | Shuichi Baba | 2016-08-16 |
| 9267898 | Optical inspection method and optical inspection apparatus | Kenji Nakahira, Toshifumi Honda | 2016-02-23 |
| 9182592 | Optical filtering device, defect inspection method and apparatus therefor | Taketo Ueno, Yukihiro Shibata, Shun'ichi Matsumoto, Atsushi Taniguchi, Hiroshi Toshiyoshi +2 more | 2015-11-10 |
| 9134279 | Internal defect inspection method and apparatus for the same | Tetsuya Matsui, Takehiro Tachizaki, Kazushi Yoshimura, Masahiro Watanabe | 2015-09-15 |
| 9063168 | Scanning probe microscope and measurement method using same | Takehiro Tachizaki, Masahiro Watanabe | 2015-06-23 |
| 8885037 | Defect inspection method and apparatus therefor | Atsushi Taniguchi, Yukihiro Shibata, Taketo Ueno | 2014-11-11 |
| 8860946 | Polarizing different phases of interfered light used in a method and apparatus for measuring displacement of a specimen | Masahiro Watanabe | 2014-10-14 |
| 8844061 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more | 2014-09-23 |
| 8804112 | Method of defect inspection and device of defect inspection | Yukihiro Shibata, Taketo Ueno, Atsushi Taniguchi, Toshifumi Honda | 2014-08-12 |
| 8787134 | Thermally assisted magnetic recording head inspection method and apparatus | Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Shinji Homma, Tsuneo Nakagomi +2 more | 2014-07-22 |
| 8736830 | Pattern inspection device of substrate surface and pattern inspection method of the same | Masahiro Watanabe, Yasuhiro Yoshitake, Hideaki Sasazawa, Minoru Yoshida | 2014-05-27 |
| 8713710 | Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus | Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tsuneo Nakagomi, Shinji Honma +2 more | 2014-04-29 |
| 8695110 | Scanning probe microscope and sample observing method using the same | Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka | 2014-04-08 |
| 8670116 | Method and device for inspecting for defects | Toshiyuki Nakao, Junguo Xu, Yuki Shimizu, Toshifumi Honda, Yukihiro Shibata +1 more | 2014-03-11 |
| 8659761 | Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light | Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake, Mineo Nomoto | 2014-02-25 |
| 8656509 | Scanning probe microscope and surface shape measuring method using same | Masahiro Watanabe, Takehiro Tachizaki | 2014-02-18 |
| 8634069 | Defect inspection device and defect inspection method | Hiroyuki Nakano, Shunji Maeda | 2014-01-21 |
| 8635710 | Scanning probe microscope and method of observing sample using the same | Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita +1 more | 2014-01-21 |
| 8629985 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2014-01-14 |
| 8553214 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2013-10-08 |
| 8508727 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2013-08-13 |
| 8483035 | Thermally assisted magnetic recording head inspection method and apparatus | Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Shinji Homma, Tsuneo Nakagomi +2 more | 2013-07-09 |
| 8462330 | Method and apparatus for detecting defects | Hiroyuki Nakano, Sachio Uto, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2013-06-11 |
| 8451439 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2013-05-28 |
| 8407811 | Scanning probe microscope and method of observing sample using the same | Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka | 2013-03-26 |