Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398497 | Three-dimensional memory device containing auxiliary support pillar structures and method of making the same | Kengo Kajiwara, Tatsuya Hinoue, Junpei Kanazawa, Masanori Terahara | 2022-07-26 |
| 9595444 | Floating gate separation in NAND flash memory | Toshiya Yokota, Takuya Sakurai | 2017-03-14 |
| 9484314 | Word line hook up with protected air gap | Masayuki Fukai, Yuji Takahashi | 2016-11-01 |
| 9011065 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Susumu Tauchi, Hideaki Kondo, Teruo Nakata, Keita Nogi, Takafumi Chida | 2015-04-21 |
| 8451439 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2013-05-28 |
| 8253934 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2012-08-28 |
| 8149395 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2012-04-03 |
| 7911601 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2011-03-22 |
| 7903249 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2011-03-08 |
| 7646477 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2010-01-12 |
| 7489395 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2009-02-10 |
| 7446866 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2008-11-04 |
| 7352890 | Method for analyzing circuit pattern defects and a system thereof | Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura, Kenji Watanabe +2 more | 2008-04-01 |
| 7127098 | Image detection method and its apparatus and defect detection method and its apparatus | Masahiro Watanabe, Syunji Maeda, Hiroshi Goto, Tadashi Suzuki | 2006-10-24 |
| 7110105 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2006-09-19 |
| 7081953 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2006-07-25 |
| 7062081 | Method and system for analyzing circuit pattern defects | Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura, Kenji Watanabe +2 more | 2006-06-13 |
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2005-08-09 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-05-31 |
| 6831737 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2004-12-14 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Ryou Nakagaki, Seiji Isogai, Yasuhiko Ozawa +3 more | 2004-06-29 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Sachio Uto, Minoru Yoshida, Shunji Maeda, Toshihiko Nakata | 2004-04-13 |
| 6556955 | Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods | Yasuhiro Yoshitake, Masataka Shiba | 2003-04-29 |
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Kenji Obara, Yasuhiko Ozawa, Hideka Bamba +4 more | 2002-11-05 |
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Yasuhiro Yoshitake, Kenji Oka, Masataka Shiba | 2002-09-24 |