Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8639019 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Shunji Maeda | 2014-01-28 |
| 8275190 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Shunji Maeda | 2012-09-25 |
| 8253934 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai, Masahiro Watanabe | 2012-08-28 |
| 8090187 | Pattern inspection method and its apparatus | Kaoru Sakai, Shunji Maeda, Hiroshi Goto, Masayuki Kuwabara, Naoya Takeuchi | 2012-01-03 |
| 8005292 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Shunji Maeda | 2011-08-23 |
| 7949178 | Pattern inspection method and its apparatus | Kaoru Sakai, Shunji Maeda | 2011-05-24 |
| 7903249 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai | 2011-03-08 |
| 7869966 | Inspection method and its apparatus, inspection system | Shunji Maeda, Kaoru Sakai | 2011-01-11 |
| 7792352 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Shunji Maeda | 2010-09-07 |
| 7711178 | Pattern inspection method and its apparatus | Kaoru Sakai, Shunji Maeda, Hiroshi Goto, Masayuki Kuwabara, Naoya Takeuchi | 2010-05-04 |
| 7646477 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai, Masahiro Watanabe | 2010-01-12 |
| 7508973 | Method of inspecting defects | Shunji Maeda, Yukihiro Shibata, Hidetoshi Nishiyama | 2009-03-24 |
| 7489395 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai | 2009-02-10 |
| 7433508 | Pattern inspection method and its apparatus | Kaoru Sakai, Shunji Maeda | 2008-10-07 |
| 7388979 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Shunji Maeda | 2008-06-17 |
| 7372561 | Method and apparatus for inspecting defects and a system for inspecting defects | Yukihiro Shibata, Shunji Maeda, Yoichi Takahara | 2008-05-13 |
| 7333677 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Shunji Maeda | 2008-02-19 |
| 7330248 | Method and apparatus for inspecting defects | Kaoru Sakai, Shunji Maeda, Masahiro Watanabe | 2008-02-12 |
| 7142708 | Defect detection method and its apparatus | Kaoru Sakai, Shunji Maeda | 2006-11-28 |
| 7127126 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Shunji Maeda | 2006-10-24 |
| 7110105 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai | 2006-09-19 |
| 7020350 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Shunji Maeda | 2006-03-28 |
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai | 2005-08-09 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai, Masahiro Watanabe | 2005-05-31 |
| 6879392 | Method and apparatus for inspecting defects | Kaoru Sakai, Shunji Maeda, Masahiro Watanabe | 2005-04-12 |