Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Yuji Takagi, Chie Shishido | 2005-01-11 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6799130 | Inspection method and its apparatus, inspection system | Shunji Maeda, Kaoru Sakai | 2004-09-28 |
| 6566671 | Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor | Atsushi Yoshida, Shunji Maeda, Hisashi Mizumoto, Mitsunobu Isobe | 2003-05-20 |
| 4731853 | Three-dimensional vision system | Seiji Hata, Takushi Okada, Makoto Ariga | 1988-03-15 |