Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8995748 | Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method | Tsunehiro Sakai, Shigeki Kurihara, Yutaka Tandai, Tamao Ishikawa, Yuichi Hamamura +2 more | 2015-03-31 |
| 8428336 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2013-04-23 |
| 7558683 | Method for inspecting defect and system therefor | Takanori Ninomiya, Shigeru Matsui, Toshiei Kurosaki | 2009-07-07 |
| 7356177 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Ryo Nakagaki, Yasuhiko Ozawa, Toshiei Kurosaki | 2008-04-08 |
| 7352890 | Method for analyzing circuit pattern defects and a system thereof | Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura +2 more | 2008-04-01 |
| 7307254 | Scanning electron microscope | Kohei Yamaguchi, Kazuo Aoki, Masashi Sakamoto | 2007-12-11 |
| 7307253 | Scanning electron microscope | Kohei Yamaguchi, Kazuo Aoki, Masashi Sakamoto | 2007-12-11 |
| 7305314 | Method for inspecting defect and system therefor | Takanori Ninomiya, Shigeru Matsui, Toshiei Kurosaki | 2007-12-04 |
| 7113628 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Ryo Nakagaki, Yasuhiro Ozawa, Toshiei Kurosaki | 2006-09-26 |
| 7068834 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2006-06-27 |
| 7062081 | Method and system for analyzing circuit pattern defects | Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura +2 more | 2006-06-13 |
| 7010447 | Method for inspecting defect and system therefor | Takanori Ninomiya, Shigeru Matsui, Toshiei Kurosaki | 2006-03-07 |
| 6978041 | Review work supporting system | Hitoshi Komuro, Hideo Wada, Katsuharu Shoda | 2005-12-20 |
| 6792359 | Method for inspecting defect and system therefor | Takanori Ninomiya, Shigeru Matsui, Toshiei Kurosaki | 2004-09-14 |
| 6757621 | Process management system | Fumio Mizuno, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa, Yuichi Ohyama +12 more | 2004-06-29 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Yasuhiko Ozawa +3 more | 2004-06-29 |
| 6542830 | Process control system | Fumio Mizuno, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa, Yuichi Ohyama +12 more | 2003-04-01 |
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa +4 more | 2002-11-05 |