Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10783625 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Fumihiko Fukunaga, Yuji Takagi | 2020-09-22 |
| 10203851 | Defect classification apparatus and defect classification method | Yohei Minekawa, Yuji Takagi, Minoru Harada, Takehiro Hirai | 2019-02-12 |
| 9811897 | Defect observation method and defect observation device | Minoru Harada, Yuji Takagi, Takehiro Hirai, Hirohiko Kitsuki | 2017-11-07 |
| 9799112 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Fumihiko Fukunaga, Yuji Takagi | 2017-10-24 |
| 9685301 | Charged-particle radiation apparatus | Takehiro Hirai, Kenji Obara | 2017-06-20 |
| 9582875 | Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system | Takehiro Hirai, Kenji Obara | 2017-02-28 |
| 9569836 | Defect observation method and defect observation device | Takehiro Hirai, Minoru Harada | 2017-02-14 |
| 9401015 | Defect classification method, and defect classification system | Yohei Minekawa, Yuji Takagi, Minoru Harada, Takehiro Hirai | 2016-07-26 |
| 9390490 | Method and device for testing defect using SEM | Yuji Takagi, Minoru Harada, Naoki Hosoya, Toshifumi Honda, Takehiro Hirai | 2016-07-12 |
| 9342879 | Method and apparatus for reviewing defect | Yohei Minekawa, Kenji Nakahira, Minoru Harada, Takehiro Hirai | 2016-05-17 |
| 9335277 | Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method | Takehiro Hirai, Kenji Obara | 2016-05-10 |
| 9311697 | Inspection method and device therefor | Minoru Harada, Takehiro Hirai, Naoki Hosoya | 2016-04-12 |
| 9082585 | Defect observation method and device using SEM | Go Kotaki, Atsushi Miyamoto, Takehiro Hirai | 2015-07-14 |
| 9040937 | Charged particle beam apparatus | Kohei Yamaguchi, Takehiro Hirai | 2015-05-26 |
| 8824773 | Defect observation method and defect observation device | Yohei Minekawa, Kenji Nakahira, Takehiro Hirai, Katsuhiro Kitahashi | 2014-09-02 |
| 8731275 | Method and apparatus for reviewing defects | Minoru Harada, Kenji Obara, Atsushi Miyamoto | 2014-05-20 |
| 8634634 | Defect observation method and defect observation apparatus | Minoru Harada, Kenji Obara | 2014-01-21 |
| 8581976 | Method and apparatus for reviewing defects of semiconductor device | Masaki Kurihara, Toshifumi Honda | 2013-11-12 |
| 8526710 | Defect review method and apparatus | Minoru Harada, Takehiro Hirai | 2013-09-03 |
| 8452076 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Masaki Kurihara, Toshifumi Honda | 2013-05-28 |
| 8428336 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2013-04-23 |
| 8355559 | Method and apparatus for reviewing defects | Minoru Harada, Kenji Obara, Atsushi Miyamoto | 2013-01-15 |
| 8150141 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Masaki Kurihara, Toshifumi Honda | 2012-04-03 |
| 8121397 | Method and its apparatus for reviewing defects | Minoru Harada, Kenji Obara | 2012-02-21 |
| 8090190 | Method and apparatus for reviewing defects | Toshifumi Honda | 2012-01-03 |