Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7991217 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Masaki Kurihara, Toshifumi Honda | 2011-08-02 |
| 7932493 | Method and system for observing a specimen using a scanning electron microscope | Minoru Harada, Kenji Obara | 2011-04-26 |
| 7873202 | Method and apparatus for reviewing defects of semiconductor device | Masaki Kurihara, Toshifumi Honda | 2011-01-18 |
| 7834317 | Scanning electron microscope and system for inspecting semiconductor device | Toshifumi Honda | 2010-11-16 |
| 7657078 | Method and apparatus for reviewing defects | Toshifumi Honda | 2010-02-02 |
| 7598490 | SEM-type reviewing apparatus and a method for reviewing defects using the same | Masaki Kurihara, Toshifumi Honda | 2009-10-06 |
| 7511272 | Method for controlling charged particle beam, and charged particle beam apparatus | Hiroki Kawada | 2009-03-31 |
| 7483560 | Method for measuring three dimensional shape of a fine pattern | Chle Shishido, Maki Tanaka, Kenji Watanabe, Yuya Toyoshima | 2009-01-27 |
| 7476856 | Sample dimension-measuring method and charged particle beam apparatus | Kenji Watanabe, Tadashi Otaka, Chie Shishido, Masakazu Takahashi, Yuya Toyoshima | 2009-01-13 |
| 7408155 | Measuring method and its apparatus | Mayuka Oosaki, Hiroki Kawada, Chie Shishido | 2008-08-05 |
| 7399964 | Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system | Chie Shishido, Mayuka Oosaki, Hiroki Kawada | 2008-07-15 |
| 7356177 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Yasuhiko Ozawa, Toshiei Kurosaki, Seiji Isogai | 2008-04-08 |
| 7216311 | System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process | Maki Tanaka, Chie Shishido, Yuji Takagi | 2007-05-08 |
| 7164127 | Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same | Hiroki Kawada, Chie Shishido, Mayuka Oosaki | 2007-01-16 |
| 7154090 | Method for controlling charged particle beam, and charged particle beam apparatus | Hiroki Kawada | 2006-12-26 |
| 7113628 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Kenji Obara, Yuji Takagi, Yasuhiro Ozawa, Toshiei Kurosaki, Seiji Isogai | 2006-09-26 |
| 7068834 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Kenji Obara +2 more | 2006-06-27 |
| 7034299 | Transmission electron microscope system and method of inspecting a specimen using the same | Yuji Takagi, Hirohito Okuda, Hiroshi Kakibayashi | 2006-04-25 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Osamu Komuro, Hidetoshi Morokuma, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6657221 | Image classification method, observation method, and apparatus thereof with different stage moving velocities | Yuji Takagi, Takashi Hiroi, Masahiro Watanabe, Minori Noguchi, Kazuo Aoki | 2003-12-02 |
| 6553323 | Method and its apparatus for inspecting a specimen | Kenji Obara, Yuji Takagi, Toshifumi Honda, Toshiei Kurosaki, Yasuhiko Ozawa | 2003-04-22 |
| 6476388 | Scanning electron microscope having magnification switching control | Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa, Hideka Bamba +4 more | 2002-11-05 |