Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7483560 | Method for measuring three dimensional shape of a fine pattern | Chle Shishido, Ryo Nakagaki, Maki Tanaka, Kenji Watanabe | 2009-01-27 |
| 7476856 | Sample dimension-measuring method and charged particle beam apparatus | Kenji Watanabe, Tadashi Otaka, Ryo Nakagaki, Chie Shishido, Masakazu Takahashi | 2009-01-13 |
| 7130063 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Tadashi Otaka, Nobuyuki Iriki | 2006-10-31 |
| 7038767 | Three-dimensional micropattern profile measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Tadashi Otaka | 2006-05-02 |
| 6894790 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Tadashi Otaka, Nobuyuki Iriki | 2005-05-17 |