Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130063 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Tadashi Otaka | 2006-10-31 |
| 6894790 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Tadashi Otaka | 2005-05-17 |
| 6716648 | Method of manufacturing and testing semiconductor integrated circuit device | — | 2004-04-06 |
| 5497331 | Semiconductor integrated circuit device fabrication method and its fabrication apparatus | Tsutomu Okabe, Kenji Watanabe, Hisashi Maejima, Shinji Kuniyoshi | 1996-03-05 |
| 5432608 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Takayoshi Oosakaya | 1995-07-11 |
| 5260771 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Takayoshi Oosakaya | 1993-11-09 |
| 5094539 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Takayoshi Oosakaya | 1992-03-10 |