Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5432608 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Nobuyuki Iriki | 1995-07-11 |
| 5260771 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Nobuyuki Iriki | 1993-11-09 |
| 5094539 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Shinya Nakagawa, Nobuyuki Iriki | 1992-03-10 |