Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11690208 | Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment | Ichiro Miyano, Masakazu Takahashi, Masashi Fujita | 2023-06-27 |
| 10840060 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada | 2020-11-17 |
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Kei Sakai, Osamu Inoue, Kazuyuki Hirao | 2020-01-28 |
| 9991092 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada | 2018-06-05 |
| 9702695 | Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof | Hiroki Kawada, Osamu Inoue, Miyako Matsui, Takahiro Kawasaki, Naoshi Itabashi +2 more | 2017-07-11 |
| 9443695 | Charged-particle beam device | Takeyoshi Ohashi, Yasunari Sohda, Noritsugu Takahashi, Hajime Kawano | 2016-09-13 |
| 9275829 | Image forming device and computer program | Katsumi Setoguchi | 2016-03-01 |
| 9202665 | Charged particle beam apparatus for removing charges developed on a region of a sample | Hiroyuki Matsui, Makoto Nishihara, Zhaohui Cheng | 2015-12-01 |
| 9129353 | Charged particle beam device, and image analysis device | Masumi Shirai | 2015-09-08 |
| 8953855 | Edge detection technique and charged particle radiation equipment | Hitoshi Namai, Satoru Yamaguchi, Fumihiro Sasajima | 2015-02-10 |
| 8704175 | Scanning electron microscope | Yasunari Sohda, Hiromasa Yamanashi, Muneyuki Fukuda, Takeyoshi Ohashi | 2014-04-22 |
| 8666165 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2014-03-04 |
| 8304724 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2012-11-06 |
| 8304725 | Charged particle beam system | Osamu Nasu | 2012-11-06 |
| 8285056 | Method and apparatus for computing degree of matching | Junichi Taguchi, Mitsuji Ikeda, Akiyuki Sugiyama | 2012-10-09 |
| 7941008 | Pattern search method | Norio Satou, Akiyuki Sugiyama, Satoru Yamaguchi | 2011-05-10 |
| 7851754 | Charged particle beam system | Osamu Nasu | 2010-12-14 |
| 7791021 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2010-09-07 |
| 7619751 | High-accuracy pattern shape evaluating method and apparatus | Atsuko Yamaguchi, Hiroshi Fukuda, Hiroki Kawada | 2009-11-17 |
| 7439505 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2008-10-21 |
| 7435959 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2008-10-14 |
| 7405835 | High-accuracy pattern shape evaluating method and apparatus | Atsuko Yamaguchi, Hiroshi Fukuda, Hiroki Kawada | 2008-07-29 |
| 7369703 | Method and apparatus for circuit pattern inspection | Atsuko Yamaguchi, Tsuneo Terasawa, Tadashi Otaka, Takashi Iizumi | 2008-05-06 |
| 7288764 | Pattern measuring method | Fumihiro Sasajima, Yoshihiro Kimura | 2007-10-30 |
| 7230723 | High-accuracy pattern shape evaluating method and apparatus | Atsuko Yamaguchi, Hiroshi Fukuda, Hiroki Kawada | 2007-06-12 |