Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217923 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2007-05-15 |
| 7214937 | Electron microscope | Katsuaki Abe, Kenichi Nishigata | 2007-05-08 |
| 7180062 | Pattern measuring method | Fumihiro Sasajima, Yoshihiro Kimura | 2007-02-20 |
| 7166840 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Yasuhiko Ozawa, Hideo Todokoro | 2007-01-23 |
| 7095884 | Method and apparatus for circuit pattern inspection | Atsuko Yamaguchi, Tsuneo Terasawa, Tadashi Otaka, Takashi Iizumi | 2006-08-22 |
| 7002151 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2006-02-21 |
| 6936819 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2005-08-30 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Hidetoshi Morokuma, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Yasuhiko Ozawa, Hideo Todokoro | 2005-03-29 |
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2004-10-12 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Hidetoshi Morokuma, Chie Shishido | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Hidetoshi Morokuma, Chie Shishido | 2004-09-14 |
| 6765204 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2004-07-20 |
| 6627888 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2003-09-30 |
| 6573499 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2003-06-03 |