Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12141173 | Error factor estimation device and error factor estimation method | Yasuhiro Yoshida, Masayoshi Ishikawa, Masami TAKANO, Koichi Hayakawa | 2024-11-12 |
| 11899437 | Diagnostic system | Masami TAKANO, Kazuhiro Ueda, Masayoshi Ishikawa, Yasuhiro Yoshida | 2024-02-13 |
| 10714304 | Charged particle beam apparatus | Muneyuki Fukuda, Yoshinori Momonoi, Akihiro Miura, Hiroaki Mito | 2020-07-14 |
| 10340115 | Charged particle beam apparatus | Muneyuki Fukuda, Yoshinori Momonoi, Akihiro Miura, Hiroaki Mito | 2019-07-02 |
| 10186399 | Scanning electron microscope | Mayuka Osaki, Chie Shishido, Maki Tanaka, Hitoshi Namai, Makoto Suzuki +1 more | 2019-01-22 |
| 9892887 | Charged particle beam apparatus | Muneyuki Fukuda, Yoshinori Momonoi, Akihiro Miura, Hiroaki Mito | 2018-02-13 |
| 9329034 | Pattern determination device and computer program | Hitoshi Namai, Satoru Yamaguchi | 2016-05-03 |
| 9153418 | Charged particle radiation apparatus | Yoshihiro Kimura, Akihiro Miura | 2015-10-06 |
| 9104913 | Pattern measuring method, pattern measuring apparatus, and program using same | Yoshihiro Kimura | 2015-08-11 |
| 8953855 | Edge detection technique and charged particle radiation equipment | Hitoshi Namai, Osamu Komuro, Satoru Yamaguchi | 2015-02-10 |
| 8953894 | Pattern matching method and image processing device | Yoshimichi Sato, Mitsuji Ikeda | 2015-02-10 |
| 8478078 | Pattern-searching condition determining method, and pattern-searching condition setting device | Kei Sakai | 2013-07-02 |
| 8304724 | Microstructured pattern inspection method | Osamu Komuro, Fumio Mizuno | 2012-11-06 |
| 8305435 | Image processing system and scanning electron microscope | Yoshimichi Sato, Mitsuji Ikeda | 2012-11-06 |
| 8200006 | Image processing apparatus for analysis of pattern matching failure | Mitsuji Ikeda, Tatsuya Maeda, Osamu Nasu | 2012-06-12 |
| 7884322 | Scanning electron microscope and a method for pattern composite inspection using the same | Saori Kato | 2011-02-08 |
| 7791021 | Microstructured pattern inspection method | Osamu Komuro, Fumio Mizuno | 2010-09-07 |
| 7705300 | Charged particle beam adjusting method and charged particle beam apparatus | Hidetoshi Morokuma, Noriaki Arai, Takashi Doi, Yoshihiro Kimura | 2010-04-27 |
| 7545977 | Image processing apparatus for analysis of pattern matching failure | Mitsuji Ikeda, Tatsuya Maeda, Osamu Nasu | 2009-06-09 |
| 7435959 | Microstructured pattern inspection method | Osamu Komuro, Fumio Mizuno | 2008-10-14 |
| 7381951 | Charged particle beam adjustment method and apparatus | Takashi Doi, Noriaki Arai, Hidetoshi Morokuma, Katsumi Setoguchi, Maki Tanaka +1 more | 2008-06-03 |
| 7288764 | Pattern measuring method | Yoshihiro Kimura, Osamu Komuro | 2007-10-30 |
| 7217923 | Microstructured pattern inspection method | Osamu Komuro, Fumio Mizuno | 2007-05-15 |
| 7180062 | Pattern measuring method | Yoshihiro Kimura, Osamu Komuro | 2007-02-20 |
| 6936819 | Microstructured pattern inspection method | Osamu Komuro, Fumio Mizuno | 2005-08-30 |