Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9129775 | Specimen potential measuring method, and charged particle beam device | Tatsuaki Ishijima, Osamu Nasu, Muneyuki Fukuda, Takeyoshi Ohashi, Takuji Miyamoto +1 more | 2015-09-08 |
| 8816277 | Pattern evaluation method, device therefor, and electron beam device | Yasunari Sohda, Takeyoshi Ohashi, Muneyuki Fukuda | 2014-08-26 |
| 8766183 | Charged particle beam device | Muneyuki Fukuda, Yasunari Sohda | 2014-07-01 |
| 8704175 | Scanning electron microscope | Yasunari Sohda, Muneyuki Fukuda, Takeyoshi Ohashi, Osamu Komuro | 2014-04-22 |
| 8026482 | Charged particle beam apparatus and control method therefor | Muneyuki Fukuda, Sayaka Tanimoto, Yasunari Souda, Osamu Nasu | 2011-09-27 |
| 7679056 | Metrology system of fine pattern for process control by charged particle beam | Muneyuki Fukuda, Sayaka Tanimoto, Yasunari Sohda | 2010-03-16 |
| 7655907 | Charged particle beam apparatus and pattern measuring method | Sayaka Tanimoto, Muneyuki Fukuda, Yasunari Sohda | 2010-02-02 |