Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8217351 | Pattern inspection method and pattern inspection system | Yasutaka Toyoda, Yuji Takagi, Koji Arai | 2012-07-10 |
| 8026482 | Charged particle beam apparatus and control method therefor | Muneyuki Fukuda, Hiromasa Yamanashi, Sayaka Tanimoto, Osamu Nasu | 2011-09-27 |
| 7786437 | Pattern inspection method and pattern inspection system | Yasutaka Toyoda, Yuji Takagi, Koji Arai | 2010-08-31 |
| 7126140 | Multi-electron beam exposure method and apparatus | Haruo Yoda, Hiroya Ohta, Yoshikiyo Yui, Shinichi Hashimoto | 2006-10-24 |
| 7067830 | Multi-electron beam exposure method and apparatus | Haruo Yoda, Hiroya Ohta, Yoshikiyo Yui, Shinichi Hashimoto | 2006-06-27 |