Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12324651 | Acoustic-wave measuring device, matching-material bag, matching gel, separation film, and acoustic-wave measurement method | Aya Yoshikawa, Takayuki Yagi, Yasufumi Asao, Takaaki Nakabayashi | 2025-06-10 |
| 8754382 | Charged particle beam drawing apparatus and method of manufacturing article | Takehiko Suzuki | 2014-06-17 |
| 8716672 | Charged particle optical system, drawing apparatus, and method of manufacturing article | Kentaro Sano, Masato Muraki, Akira Miyake | 2014-05-06 |
| 7608844 | Charged particle beam drawing apparatus | Yuji Inoue, Haruo Yoda, Kimiaki Ando | 2009-10-27 |
| 7126140 | Multi-electron beam exposure method and apparatus | Haruo Yoda, Yasunari Souda, Hiroya Ohta, Shinichi Hashimoto | 2006-10-24 |
| 7067830 | Multi-electron beam exposure method and apparatus | Haruo Yoda, Yasunari Souda, Hiroya Ohta, Shinichi Hashimoto | 2006-06-27 |
| 6992307 | Electron beam source and electron beam exposure apparatus employing the electron beam source | Hiroya Ohta | 2006-01-31 |
| 6903352 | Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method | Masato Muraki | 2005-06-07 |
| 6835937 | Correcting method for correcting exposure data used for a charged particle beam exposure system | Masato Muraki | 2004-12-28 |
| 6777697 | Charged-particle beam exposure apparatus and device manufacturing method using the same | Masato Muraki | 2004-08-17 |
| 6741732 | Exposure method and device manufacturing method using this exposure method | — | 2004-05-25 |
| 6667486 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Hiroya Ohta, Yasunari Sohda, Norio Saitou, Haruo Yoda, Shin'ichi Hashimoto | 2003-12-23 |
| 6593686 | Electron gun and electron beam drawing apparatus using the same | — | 2003-07-15 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Haruhito Ono, Masato Muraki | 2003-05-06 |
| 6515409 | Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method | Masato Muraki | 2003-02-04 |
| 6483120 | Control system for a charged particle exposure apparatus | Masato Muraki | 2002-11-19 |
| 6466301 | Transfer apparatus and transfer method | Masato Muraki | 2002-10-15 |
| 6455211 | Pattern transfer method and apparatus, and device manufacturing method | Masato Muraki | 2002-09-24 |
| 5107275 | Exposure control system | Yuji Tsuruoka | 1992-04-21 |
| 5053614 | Exposure control method and apparatus compensating for detection of offset from a measured value | Yuji Tsuruoka | 1991-10-01 |
| 4714331 | Method and apparatus for automatic focusing | Kazuyuki Oda, Yoshiharu Kataoka, Hideo Hata | 1987-12-22 |
| 4713675 | Exposure apparatus | — | 1987-12-15 |