Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237145 | Charged particle beam device and inspection device | Atsuko Shintani, Makoto Suzuki | 2025-02-25 |
| 11713963 | Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method | Atsuko Shintani, Takahiro Kawasaki, Kazuhisa Hasumi, Masami Ikota | 2023-08-01 |
| 10816333 | Pattern measurement method and pattern measurement device | — | 2020-10-27 |
| 10665424 | Pattern measuring method and pattern measuring apparatus | Takahiro Kawasaki, Junichi Kakuta | 2020-05-26 |
| 10438771 | Measurement device, calibration method of measurement device, and calibration member | Michio Hatano, Yoshinori Nakayama, Masaru Matsuzaki, Yoshinori Momonoi, Zhigang Wang | 2019-10-08 |
| 10393509 | Pattern height measurement device and charged particle beam device | Katsuhiro Sasada, Takenori Hirose, Shou Takami | 2019-08-27 |
| 10184790 | Pattern measurement method and pattern measurement device | Hideo Sakai, Katsuhiro Sasada | 2019-01-22 |
| 10101150 | Height measurement device and charged particle beam device | Muneyuki Fukuda, Yoshinori Momonoi, Shou Takami | 2018-10-16 |
| 10002743 | Measurement system and measurement method | Shoji Hotta, Osamu Inoue | 2018-06-19 |
| 9934940 | Control device, charged particle beam apparatus, program and method for producing processed product | Satoshi Tomimatsu, Tsuyoshi Oonishi, Hideo Sakai | 2018-04-03 |
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta +1 more | 2017-11-28 |
| 9824938 | Charged particle beam device and inspection device | Atsuko Yamaguchi, Osamu Inoue | 2017-11-21 |
| 9702695 | Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof | Osamu Inoue, Miyako Matsui, Takahiro Kawasaki, Naoshi Itabashi, Takashi Takahama +2 more | 2017-07-11 |
| 9658063 | Method and device for line pattern shape evaluation | Atsuko Yamaguchi | 2017-05-23 |
| 9536170 | Measurement method, image processing device, and charged particle beam apparatus | Takeyoshi Ohashi, Junichi Tanaka, Yutaka Hojo, Hiroyuki Shindo | 2017-01-03 |
| 9305744 | Measuring method, data processing apparatus and electron microscope using same | Takeyoshi Ohashi, Junichi Tanaka, Tomoko Sekiguchi | 2016-04-05 |
| 9297649 | Pattern dimension measurement method and charged particle beam apparatus | Norio Hasegawa, Toru Ikegami | 2016-03-29 |
| 9123504 | Semiconductor inspection device and semiconductor inspection method using the same | Atsuko Yamaguchi, Yoshinori Momonoi, Junichi Tanaka | 2015-09-01 |
| 9000366 | Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns | Atsuko Yamaguchi, Yasunari Sohda, Tatsuya Maeda, Osamu Nasu | 2015-04-07 |
| 8502144 | Tool-to-tool matching control method and its system for scanning electron microscope | Mayuka Oosaki, Chie Shishido, Tatsuya Maeda | 2013-08-06 |
| 8399832 | Scanning electron microscope and CD measurement calibration standard specimen | Takeshi Mizuno | 2013-03-19 |
| 8369602 | Length measurement system | Atsuko Yamaguchi, Jiro Yamamoto | 2013-02-05 |
| 8362426 | Scanning electron microscope and image signal processing method | Atsushi Kobaru, Katsuhiro Sasada | 2013-01-29 |
| 8300919 | Apparatus for data analysis | Atsuko Yamaguchi | 2012-10-30 |
| 8207512 | Charged particle beam apparatus and methods for capturing images using the same | Chie Shishido, Mayuka Oosaki, Mitsugu Sato, Tatsuya Maeda | 2012-06-26 |