Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10445875 | Pattern-measuring apparatus and semiconductor-measuring system | Yasutaka Toyoda, Norio Hasegawa, Takeshi Kato, Hitoshi Sugahara, Daisuke Hibino +1 more | 2019-10-15 |
| 9990708 | Pattern-measuring apparatus and semiconductor-measuring system | Yasutaka Toyoda, Norio Hasegawa, Takeshi Kato, Hitoshi Sugahara, Daisuke Hibino +1 more | 2018-06-05 |
| 9536170 | Measurement method, image processing device, and charged particle beam apparatus | Takeyoshi Ohashi, Junichi Tanaka, Hiroyuki Shindo, Hiroki Kawada | 2017-01-03 |
| 8959461 | Pattern measurement device and pattern measurement method | Takuma Shibahara, Michio Oikawa, Hitoshi Sugahara, Hiroyuki Shindo | 2015-02-17 |
| 8942464 | Pattern measuring apparatus, and pattern measuring method and program | Takuma Shibahara, Tsuyoshi Minakawa, Michio Oikawa, Hitoshi Sugahara, Hiroyuki Shindo | 2015-01-27 |
| 8199191 | Electron microscope for inspecting dimension and shape of a pattern formed on a wafer | Hidetoshi Sato, Takumichi Sutani | 2012-06-12 |
| 7772554 | Charged particle system | Akiyuki Sugiyama, Hidetoshi Morokuma, Yukio Yoshizawa | 2010-08-10 |