Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732512 | Image processor, method for generating pattern using self-organizing lithographic techniques and computer program | Miki Isawa, Shunsuke Koshihara, Akiyuki Sugiyama | 2020-08-04 |
| RE45224 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma | 2014-10-28 |
| RE45204 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma | 2014-10-21 |
| 8788981 | Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device | Mihoko Kijima, Kyoungmo Yang, Shigeki Sukegawa | 2014-07-22 |
| 8577124 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Ryoichi Matsuoka, Hidemitsu Naya | 2013-11-05 |
| 8507856 | Pattern measuring method and pattern measuring device | Ryoichi Matsuoka, Hidetoshi Morokuma, Hitoshi Komuro, Akiyuki Sugiyama | 2013-08-13 |
| 8338804 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Ryoichi Matsuoka, Yasutaka Toyoda | 2012-12-25 |
| 8331651 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Chie Shishido | 2012-12-11 |
| 8244042 | Pattern matching method and computer program for executing pattern matching | Akiyuki Sugiyama, Hiroyuki Shindo, Hitoshi Komuro, Hidetoshi Morokuma | 2012-08-14 |
| 8199191 | Electron microscope for inspecting dimension and shape of a pattern formed on a wafer | Hidetoshi Sato, Yutaka Hojo | 2012-06-12 |
| 8173962 | Pattern displacement measuring method and pattern measuring device | Ryoichi Matsuoka, Hidetoshi Morokuma, Akiyuki Sugiyama, Hiroyuki Shindo | 2012-05-08 |
| 8131059 | Defect inspection device and defect inspection method for inspecting whether a product has defects | Junichi Taguchi | 2012-03-06 |
| 8115169 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Ryoichi Matsuoka, Hidemitsu Naya | 2012-02-14 |
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Chie Shishido | 2011-10-25 |
| 8019161 | Method, device and computer program of length measurement | Hidetoshi Morokuma, Ryoichi Matsuoka, Hitoshi Komuro, Akiyuki Sugiyama | 2011-09-13 |
| 7991218 | Pattern matching apparatus and semiconductor inspection system using the same | Yasutaka Toyoda, Ryoichi Matsuoka | 2011-08-02 |
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Yasutaka Toyoda, Ryoichi Matsuoka, Hidemitsu Naya | 2011-07-12 |
| 7925095 | Pattern matching method and computer program for executing pattern matching | Akiyuki Sugiyama, Hiroyuki Shindo, Hitoshi Komuro, Hidetoshi Morokuma | 2011-04-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Ryoichi Matsuoka, Yasutaka Toyoda | 2011-04-12 |
| 7889909 | Pattern matching method and pattern matching program | Hiroyuki Shindo, Akiyuki Sugiyama, Hidetoshi Morokuma, Hitoshi Komuro | 2011-02-15 |
| 7800060 | Pattern measurement method and pattern measurement system | Hidetoshi Sato, Ryoichi Matsuoka | 2010-09-21 |
| 7679055 | Pattern displacement measuring method and pattern measuring device | Ryoichi Matsuoka, Hidetoshi Morokuma, Akiyuki Sugiyama, Hiroyuki Shindo | 2010-03-16 |
| 7681159 | System and method for detecting defects in a semiconductor during manufacturing thereof | Ryoichi Matsuoka, Hidetoshi Morokuma | 2010-03-16 |
| 7559047 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma | 2009-07-07 |
| 7518110 | Pattern measuring method and pattern measuring device | Ryoichi Matsuoka, Hidetoshi Morokuma, Hitoshi Komuro, Akiyuki Sugiyama | 2009-04-14 |