Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507961 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Ryoichi Matsuoka, Hidemitsu Naya | 2009-03-24 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Wataru Nagatomo, Ryoichi Matsuoka, Akiyuki Sugiyama, Yasuhiro Yoshitake, Hideaki Sasazawa | 2008-11-11 |
| 7365322 | Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma | 2008-04-29 |
| 7108945 | Photomask having a focus monitor pattern | Kyoko Izuha, Tadahito Fujisawa, Soichi Inoue | 2006-09-19 |
| 6701512 | Focus monitoring method, exposure apparatus, and exposure mask | Tadahito Fujisawa, Takashi Sato, Takashi Sakamoto, Masafumi Asano, Soichi Inoue | 2004-03-02 |