Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732512 | Image processor, method for generating pattern using self-organizing lithographic techniques and computer program | Takumichi Sutani, Miki Isawa, Shunsuke Koshihara | 2020-08-04 |
| 10545018 | Pattern measurement device, and computer program for measuring pattern | Satoru Yamaguchi, Norio Hasegawa, Miki Isawa, Akihiro Onizawa, Ryuji Mitsuhashi | 2020-01-28 |
| 9804107 | Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns | Miki Isawa, Satoru Yamaguchi, Motonobu Hommi | 2017-10-31 |
| 9704235 | Semiconductor inspection system | Yuichi Abe | 2017-07-11 |
| 8867818 | Method of creating template for matching, as well as device for creating template | Ryoichi Matsuoka, Yasutaka Toyoda | 2014-10-21 |
| 8788242 | Pattern measurement apparatus | Ryoichi Matsuoka, Yasutaka Toyota | 2014-07-22 |
| 8577124 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Ryoichi Matsuoka, Takumichi Sutani, Hidemitsu Naya | 2013-11-05 |
| 8515153 | System and method of image processing, and scanning electron microscope | Hiroyuki Shindo | 2013-08-20 |
| 8507856 | Pattern measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Hidetoshi Morokuma, Hitoshi Komuro | 2013-08-13 |
| 8445871 | Pattern measurement apparatus | Ryoichi Matsuoka, Akihiro Onizawa, Hidetoshi Morokuma, Yasutaka Toyoda | 2013-05-21 |
| 8355562 | Pattern shape evaluation method | Yasutaka Toyoda, Ryoichi Matsuoka | 2013-01-15 |
| 8338804 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Ryoichi Matsuoka, Takumichi Sutani, Yasutaka Toyoda | 2012-12-25 |
| 8311314 | Pattern measuring method and pattern measuring device | Ryoichi Matsuoka | 2012-11-13 |
| 8285056 | Method and apparatus for computing degree of matching | Junichi Taguchi, Mitsuji Ikeda, Osamu Komuro | 2012-10-09 |
| 8244042 | Pattern matching method and computer program for executing pattern matching | Hiroyuki Shindo, Hitoshi Komuro, Takumichi Sutani, Hidetoshi Morokuma | 2012-08-14 |
| 8173962 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Hidetoshi Morokuma, Hiroyuki Shindo | 2012-05-08 |
| 8115169 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Ryoichi Matsuoka, Takumichi Sutani, Hidemitsu Naya | 2012-02-14 |
| 8094920 | System and method of image processing, and scanning electron microscope | Hiroyuki Shindo | 2012-01-10 |
| 8019161 | Method, device and computer program of length measurement | Hidetoshi Morokuma, Takumichi Sutani, Ryoichi Matsuoka, Hitoshi Komuro | 2011-09-13 |
| 7941008 | Pattern search method | Norio Satou, Osamu Komuro, Satoru Yamaguchi | 2011-05-10 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Ryoichi Matsuoka, Takumichi Sutani, Yasutaka Toyoda | 2011-04-12 |
| 7925095 | Pattern matching method and computer program for executing pattern matching | Hiroyuki Shindo, Hitoshi Komuro, Takumichi Sutani, Hidetoshi Morokuma | 2011-04-12 |
| 7889909 | Pattern matching method and pattern matching program | Hiroyuki Shindo, Takumichi Sutani, Hidetoshi Morokuma, Hitoshi Komuro | 2011-02-15 |
| 7772554 | Charged particle system | Hidetoshi Morokuma, Yutaka Hojo, Yukio Yoshizawa | 2010-08-10 |
| 7732792 | Pattern measurement apparatus | Ryoichi Matsuoka, Akihiro Onizawa, Hidetoshi Morokuma, Yasutaka Toyoda | 2010-06-08 |