Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670481 | Charged particle beam device | Satoru Yamaguchi, Kei Sakai, Hiroshi Nishihama | 2023-06-06 |
| 9804107 | Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns | Akiyuki Sugiyama, Miki Isawa, Satoru Yamaguchi | 2017-10-31 |