Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854420 | Pattern evaluation device | Ayumi DOI, Kazuhisa Hasumi | 2020-12-01 |
| 10732512 | Image processor, method for generating pattern using self-organizing lithographic techniques and computer program | Takumichi Sutani, Shunsuke Koshihara, Akiyuki Sugiyama | 2020-08-04 |
| 10545018 | Pattern measurement device, and computer program for measuring pattern | Satoru Yamaguchi, Norio Hasegawa, Akiyuki Sugiyama, Akihiro Onizawa, Ryuji Mitsuhashi | 2020-01-28 |
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Kei Sakai, Satoshi Takada, Kazuhisa Hasumi +1 more | 2017-11-28 |
| 9804107 | Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns | Akiyuki Sugiyama, Satoru Yamaguchi, Motonobu Hommi | 2017-10-31 |
| 9627171 | Charged particle beam device | Hiroshi Makino, Hideyuki Kazumi, Minoru Yamazaki, Yuzuru Mizuhara | 2017-04-18 |
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Kei Sakai, Norio Hasegawa | 2017-03-07 |
| 9502212 | Charged particle beam apparatus | Yuzuru Mizuhara, Minoru Yamazaki, Hitoshi Tamura, Hideyuki Kazumi | 2016-11-22 |
| 9472376 | Scanning electron microscope | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hiroshi Makino, Yuzuru Mizuhara +2 more | 2016-10-18 |
| 9000365 | Pattern measuring apparatus and computer program | Yuzuru Mochizuki, Maki Tanaka, Satoru Yamaguchi | 2015-04-07 |
| 8648300 | Charged particle beam apparatus | Minoru Yamazaki, Yuzuru Mizuhara, Hiroshi Makino, Hideyuki Kazumi | 2014-02-11 |