Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670481 | Charged particle beam device | Motonobu Hommi, Satoru Yamaguchi, Kei Sakai | 2023-06-06 |
| 10755890 | Charged particle beam apparatus | Shinya UENO, Shaungqi Dong, Shahedul Hoque, Susumu Koyama | 2020-08-25 |
| 10546715 | Charged particle beam device | Shahedul Hoque, Hajime Kawano, Yoshinori Momonoi, Hideki ITAI, Minoru Yamazaki | 2020-01-28 |
| 8872106 | Pattern measuring apparatus | Tatsuya Maeda, Mitsuji Ikeda, Susumu Koyama | 2014-10-28 |