| 12142455 |
Charged particle beam apparatus with multiple detectors and methods for imaging |
Xuedong Liu, Weimin Zhou, Xiaoxue CHEN, Xiaoyu JI, Heng Li +3 more |
2024-11-12 |
| 11798780 |
Charged particle beam device |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more |
2023-10-24 |
| 11749497 |
Charged particle beam apparatus |
Shunsuke Mizutani, Uki Ikeda, Makoto Suzuki |
2023-09-05 |
| 11694873 |
Charged particle beam apparatus |
Yoshifumi Sekiguchi, Shin Imamura, Shunsuke Mizutani, Uki Ikeda |
2023-07-04 |
| 11515120 |
Charged particle beam apparatus |
Yoshifumi Sekiguchi, Shin Imamura, Shunsuke Mizutani, Uki Ikeda |
2022-11-29 |
| 11239052 |
Charged particle beam device |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more |
2022-02-01 |
| 11139144 |
Charged particle beam apparatus |
Shunsuke Mizutani, Uki Ikeda, Makoto Suzuki |
2021-10-05 |
| 10984979 |
Charged particle detector and charged particle beam apparatus |
Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Hajime Kawano, Shunsuke Mizutani +1 more |
2021-04-20 |
| 10984981 |
Charged particle beam device having inspection scan direction based on scan with smaller dose |
Hideki ITAI, Kumiko Shimizu, Wataru MORI, Hajime Kawano |
2021-04-20 |
| 10872745 |
Charged-particle beam system |
Akio Yamamoto, Kazuki Ikeda, Wen Li, Hiroyuki Takahashi, Shunsuke Mizutani |
2020-12-22 |
| 10755890 |
Charged particle beam apparatus |
Shinya UENO, Hiroshi Nishihama, Shaungqi Dong, Susumu Koyama |
2020-08-25 |
| 10720306 |
Charged particle beam device |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more |
2020-07-21 |
| 10679821 |
Light guide, detector having light guide, and charged particle beam device |
Yoshifumi Sekiguchi, Shin Imamura, Hajime Kawano |
2020-06-09 |
| 10593512 |
Light guide, detector having light guide, and charged particle beam device |
Yoshifumi Sekiguchi, Shin Imamura, Hajime Kawano |
2020-03-17 |
| 10546715 |
Charged particle beam device |
Hajime Kawano, Yoshinori Momonoi, Hideki ITAI, Minoru Yamazaki, Hiroshi Nishihama |
2020-01-28 |
| 10297419 |
Scanning electron microscope with charge density control |
Hajime Kawano |
2019-05-21 |
| 10249474 |
Charged particle beam device |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more |
2019-04-02 |
| 9697987 |
Charged particle beam device |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more |
2017-07-04 |
| 9053905 |
Electron beam irradiation apparatus |
Hajime Kawano |
2015-06-09 |
| 8618499 |
Electron beam irradiation apparatus |
Hajime Kawano |
2013-12-31 |