Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142455 | Charged particle beam apparatus with multiple detectors and methods for imaging | Xuedong Liu, Weimin Zhou, Xiaoxue CHEN, Xiaoyu JI, Heng Li +3 more | 2024-11-12 |
| 11798780 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more | 2023-10-24 |
| 11749497 | Charged particle beam apparatus | Shunsuke Mizutani, Uki Ikeda, Makoto Suzuki | 2023-09-05 |
| 11694873 | Charged particle beam apparatus | Yoshifumi Sekiguchi, Shin Imamura, Shunsuke Mizutani, Uki Ikeda | 2023-07-04 |
| 11515120 | Charged particle beam apparatus | Yoshifumi Sekiguchi, Shin Imamura, Shunsuke Mizutani, Uki Ikeda | 2022-11-29 |
| 11239052 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more | 2022-02-01 |
| 11139144 | Charged particle beam apparatus | Shunsuke Mizutani, Uki Ikeda, Makoto Suzuki | 2021-10-05 |
| 10984979 | Charged particle detector and charged particle beam apparatus | Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Hajime Kawano, Shunsuke Mizutani +1 more | 2021-04-20 |
| 10984981 | Charged particle beam device having inspection scan direction based on scan with smaller dose | Hideki ITAI, Kumiko Shimizu, Wataru MORI, Hajime Kawano | 2021-04-20 |
| 10872745 | Charged-particle beam system | Akio Yamamoto, Kazuki Ikeda, Wen Li, Hiroyuki Takahashi, Shunsuke Mizutani | 2020-12-22 |
| 10755890 | Charged particle beam apparatus | Shinya UENO, Hiroshi Nishihama, Shaungqi Dong, Susumu Koyama | 2020-08-25 |
| 10720306 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more | 2020-07-21 |
| 10679821 | Light guide, detector having light guide, and charged particle beam device | Yoshifumi Sekiguchi, Shin Imamura, Hajime Kawano | 2020-06-09 |
| 10593512 | Light guide, detector having light guide, and charged particle beam device | Yoshifumi Sekiguchi, Shin Imamura, Hajime Kawano | 2020-03-17 |
| 10546715 | Charged particle beam device | Hajime Kawano, Yoshinori Momonoi, Hideki ITAI, Minoru Yamazaki, Hiroshi Nishihama | 2020-01-28 |
| 10297419 | Scanning electron microscope with charge density control | Hajime Kawano | 2019-05-21 |
| 10249474 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more | 2019-04-02 |
| 9697987 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hajime Kawano, Kumiko Shimizu +1 more | 2017-07-04 |
| 9053905 | Electron beam irradiation apparatus | Hajime Kawano | 2015-06-09 |
| 8618499 | Electron beam irradiation apparatus | Hajime Kawano | 2013-12-31 |