Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7679055 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Hidetoshi Morokuma, Hiroyuki Shindo | 2010-03-16 |
| 7518110 | Pattern measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Hidetoshi Morokuma, Hitoshi Komuro | 2009-04-14 |
| 7507961 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Ryoichi Matsuoka, Takumichi Sutani, Hidemitsu Naya | 2009-03-24 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Wataru Nagatomo, Ryoichi Matsuoka, Takumichi Sutani, Yasuhiro Yoshitake, Hideaki Sasazawa | 2008-11-11 |