Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643326 | Semiconductor measurement apparatus and computer program | Yasutaka Toyoda | 2020-05-05 |
| 9830705 | Image evaluation apparatus and pattern shape evaluation apparatus | Shinichi Shinoda, Yasutaka Toyoda, Tsuyoshi Minakawa | 2017-11-28 |
| 9696150 | Overlay error measuring device and computer program | — | 2017-07-04 |
| 9343264 | Scanning electron microscope device and pattern dimension measuring method using same | Go Kotaki, Atsushi Miyamoto | 2016-05-17 |
| 9183622 | Image processing apparatus | Yasutaka Toyoda, Norio Hasegawa, Atsuko Yamaguchi | 2015-11-10 |
| 8994815 | Method of extracting contour lines of image data obtained by means of charged particle beam device, and contour line extraction device | Hiroaki Mito | 2015-03-31 |
| 8977034 | Pattern shape evaluation method and pattern shape evaluation apparatus | Yasutaka Toyoda | 2015-03-10 |
| 8972911 | Image processing device and computer program for performing image processing | Hiroaki Mito | 2015-03-03 |
| RE45224 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma, Takumichi Sutani | 2014-10-28 |
| 8867818 | Method of creating template for matching, as well as device for creating template | Akiyuki Sugiyama, Yasutaka Toyoda | 2014-10-21 |
| RE45204 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma, Takumichi Sutani | 2014-10-21 |
| 8853630 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma | 2014-10-07 |
| 8788242 | Pattern measurement apparatus | Akiyuki Sugiyama, Yasutaka Toyota | 2014-07-22 |
| 8767038 | Method and device for synthesizing panorama image using scanning charged-particle microscope | Atsushi Miyamoto, Go Kotaki | 2014-07-01 |
| 8705841 | Pattern inspection method, pattern inspection apparatus and pattern processing apparatus | Shinichi Shinoda, Yasutaka Toyoda | 2014-04-22 |
| 8687921 | Image processing apparatus, image processing method, and image processing program | Shinichi Shinoda, Yasutaka Toyoda | 2014-04-01 |
| 8655050 | Pattern generating apparatus and pattern shape evaluating apparatus | Yasutaka Toyoda, Hideo Sakai | 2014-02-18 |
| 8642957 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma | 2014-02-04 |
| 8581187 | Method for measuring sample and measurement device | Mihoko Kijima, Shunsuke Koshihara, Hitoshi Komuro | 2013-11-12 |
| 8577125 | Method and apparatus for image generation | Shinichi Shinoda, Yasutaka Toyoda | 2013-11-05 |
| 8577124 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Takumichi Sutani, Hidemitsu Naya | 2013-11-05 |
| 8515155 | Pattern generating apparatus and pattern shape evaluating apparatus | Yasutaka Toyoda, Hideo Sakai | 2013-08-20 |
| 8507856 | Pattern measuring method and pattern measuring device | Takumichi Sutani, Hidetoshi Morokuma, Hitoshi Komuro, Akiyuki Sugiyama | 2013-08-13 |
| 8445871 | Pattern measurement apparatus | Akihiro Onizawa, Akiyuki Sugiyama, Hidetoshi Morokuma, Yasutaka Toyoda | 2013-05-21 |
| 8363923 | Pattern generating apparatus and pattern shape evaluating apparatus | Yasutaka Toyoda, Hideo Sakai | 2013-01-29 |