Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8355562 | Pattern shape evaluation method | Yasutaka Toyoda, Akiyuki Sugiyama | 2013-01-15 |
| 8338804 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Takumichi Sutani, Yasutaka Toyoda | 2012-12-25 |
| 8311314 | Pattern measuring method and pattern measuring device | Akiyuki Sugiyama | 2012-11-13 |
| 8295584 | Pattern measurement methods and pattern measurement equipment | Hidetoshi Sato | 2012-10-23 |
| 8173962 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Hidetoshi Morokuma, Akiyuki Sugiyama, Hiroyuki Shindo | 2012-05-08 |
| 8158938 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma | 2012-04-17 |
| 8115169 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Takumichi Sutani, Hidemitsu Naya | 2012-02-14 |
| 8077962 | Pattern generating apparatus and pattern shape evaluating apparatus | Yasutaka Toyoda, Hideo Sakai | 2011-12-13 |
| 8073242 | SEM system and a method for producing a recipe | Atsushi Miyamoto, Tomofumi Nishiura, Hidetoshi Morokuma | 2011-12-06 |
| 8019161 | Method, device and computer program of length measurement | Hidetoshi Morokuma, Takumichi Sutani, Hitoshi Komuro, Akiyuki Sugiyama | 2011-09-13 |
| 7991218 | Pattern matching apparatus and semiconductor inspection system using the same | Yasutaka Toyoda, Takumichi Sutani | 2011-08-02 |
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Yasutaka Toyoda, Takumichi Sutani, Hidemitsu Naya | 2011-07-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Takumichi Sutani, Yasutaka Toyoda | 2011-04-12 |
| 7800060 | Pattern measurement method and pattern measurement system | Hidetoshi Sato, Takumichi Sutani | 2010-09-21 |
| 7732792 | Pattern measurement apparatus | Akihiro Onizawa, Akiyuki Sugiyama, Hidetoshi Morokuma, Yasutaka Toyoda | 2010-06-08 |
| 7679055 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Hidetoshi Morokuma, Akiyuki Sugiyama, Hiroyuki Shindo | 2010-03-16 |
| 7681159 | System and method for detecting defects in a semiconductor during manufacturing thereof | Hidetoshi Morokuma, Takumichi Sutani | 2010-03-16 |
| 7615746 | Method and apparatus for evaluating pattern shape of a semiconductor device | Wataru Nagatomo, Atsushi Miyamoto | 2009-11-10 |
| 7559047 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma, Takumichi Sutani | 2009-07-07 |
| 7518110 | Pattern measuring method and pattern measuring device | Takumichi Sutani, Hidetoshi Morokuma, Hitoshi Komuro, Akiyuki Sugiyama | 2009-04-14 |
| 7507961 | Method and apparatus of pattern inspection and semiconductor inspection system using the same | Yasutaka Toyoda, Akiyuki Sugiyama, Takumichi Sutani, Hidemitsu Naya | 2009-03-24 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Wataru Nagatomo, Takumichi Sutani, Akiyuki Sugiyama, Yasuhiro Yoshitake, Hideaki Sasazawa | 2008-11-11 |
| 7365322 | Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern | Atsushi Miyamoto, Wataru Nagatomo, Hidetoshi Morokuma, Takumichi Sutani | 2008-04-29 |
| 7257785 | Method and apparatus of evaluating layer matching deviation based on CAD information | — | 2007-08-14 |
| 6757875 | Method and apparatus of evaluating layer matching deviation based on CAD information | — | 2004-06-29 |