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Shigeki Sukegawa

HH Hitachi High-Technologies: 4 patents #776 of 1,917Top 45%
📍 Hitachinaka, JP: #962 of 2,447 inventorsTop 40%
Overall (All Time): #1,154,813 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10984143 Recipe creation device for use in semiconductor measurement device or semiconductor inspection device Hiromi Fujita, Toshikazu Kawahara, Yoshihiro Ota 2021-04-20
8788981 Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device Mihoko Kijima, Kyoungmo Yang, Takumichi Sutani 2014-07-22
8552371 Method for adjusting imaging magnification and charged particle beam apparatus Shunsuke Koshihara, Kyoungmo Yang 2013-10-08
7834316 Method for adjusting imaging magnification and charged particle beam apparatus Shunsuke Koshihara, Kyoungmo Yang 2010-11-16