Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984143 | Recipe creation device for use in semiconductor measurement device or semiconductor inspection device | Hiromi Fujita, Yoshihiro Ota, Shigeki Sukegawa | 2021-04-20 |
| 9211629 | Polishing apparatus | — | 2015-12-15 |
| 9057873 | Global alignment using multiple alignment pattern candidates | Atsushi Miyamoto, Naoki Hosoya, Akihiro Onizawa | 2015-06-16 |
| 8189040 | Recipe generation system and method | Hiromi Fujita, Hitoshi Komuro | 2012-05-29 |