Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8929665 | Method of manufacturing a template matching template, as well as a device for manufacturing a template | Yukari Yamada, Junichi Kakuta | 2015-01-06 |
| 8788981 | Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device | Mihoko Kijima, Shigeki Sukegawa, Takumichi Sutani | 2014-07-22 |
| 8774493 | Apparatus for forming image for pattern matching | Yuichi Abe | 2014-07-08 |
| 8552371 | Method for adjusting imaging magnification and charged particle beam apparatus | Shigeki Sukegawa, Shunsuke Koshihara | 2013-10-08 |
| 8180140 | Template creation method and image processor therefor | Makoto Nishihara, Shunsuke Koshihara | 2012-05-15 |
| 7834316 | Method for adjusting imaging magnification and charged particle beam apparatus | Shigeki Sukegawa, Shunsuke Koshihara | 2010-11-16 |