Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840070 | Ion beam device and cleaning method for gas field ion source | Yoshimi Kawanami, Tomihiro Hashizume, Hiroyasu Shichi, Shinichi Matsubara | 2020-11-17 |
| 8362426 | Scanning electron microscope and image signal processing method | Katsuhiro Sasada, Hiroki Kawada | 2013-01-29 |
| 8335397 | Charged particle beam apparatus | Atsushi Takane, Mitsuji Ikeda | 2012-12-18 |
| 8274048 | Scanning electron microscope having time constant measurement capability | Akira Ikegami, Hideyuki Kazumi, Koichiro Takeuchi, Seiko Oomori | 2012-09-25 |
| 8203504 | Image forming method and charged particle beam apparatus | Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2012-06-19 |
| 8000939 | Charged particle beam apparatus | — | 2011-08-16 |
| 7838840 | Charged particle beam apparatus | — | 2010-11-23 |
| 7817105 | Image forming method and charged particle beam apparatus | Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2010-10-19 |
| 7763852 | Scanning electron microscope having time constant measurement capability | Akira Ikegami, Hideyuki Kazumi, Koichiro Takeuchi, Seiko Oomori | 2010-07-27 |
| 7288763 | Method of measurement accuracy improvement by control of pattern shrinkage | Satoshi Ikeda, Hiroki Kawada | 2007-10-30 |
| 7187345 | Image forming method and charged particle beam apparatus | Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2007-03-06 |
| 7045782 | Method of measurement accuracy improvement by control of pattern shrinkage | Satoshi Ikeda, Hiroki Kawada | 2006-05-16 |
| 6667483 | Apparatus using charged particle beam | Tadashi Otaka | 2003-12-23 |
| 5614713 | Scanning electron microscope | Tadashi Otaka, Tatsuya Maeda, Katsuhiro Sasada | 1997-03-25 |