Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002743 | Measurement system and measurement method | Hiroki Kawada, Osamu Inoue | 2018-06-19 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Natsuki Tsuno, Naomasa Suzuki, Hideyuki Kazumi, Yoshinobu Kimura | 2017-05-23 |
| 8575547 | Electron beam measurement apparatus | Yasunari Sohda, Shinji Okazaki, Muneyuki Fukuda | 2013-11-05 |
| 8148682 | Method and apparatus for pattern position and overlay measurement | Norio Hasegawa | 2012-04-03 |
| 7943903 | Defect inspection method and its system | Shinji Okazaki, Yasunari Sohda, Yoshinori Nakayama | 2011-05-17 |
| 7884325 | Electron beam measurement apparatus | Yasunari Sohda, Shinji Okazaki, Muneyuki Fukuda | 2011-02-08 |
| 7419916 | Manufacturing method of semiconductor device | Junji Noguchi, Hideo Aoki, Takayuki Oshima | 2008-09-02 |
| 7387867 | Manufacturing method of semiconductor integrated circuit device | Norio Hasegawa, Katsuya Hayano | 2008-06-17 |
| 7109127 | Manufacturing method of semiconductor device | Junji Noguchi, Hideo Aoki, Takayuki Oshima | 2006-09-19 |
| 6939649 | Fabrication method of semiconductor integrated circuit device and mask | Norio Hasegawa, Toshihiko Tanaka | 2005-09-06 |
| 6774020 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Hideo Aoki, Takayuki Oshima +1 more | 2004-08-10 |
| 6656646 | Fabrication method of semiconductor integrated circuit device | Norio Hasegawa | 2003-12-02 |
| 6555464 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Hideo Aoki, Takayuki Oshima +1 more | 2003-04-29 |
| 6528400 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Hideo Aoki, Takayuki Oshima +1 more | 2003-03-04 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Hideo Aoki, Takayuki Oshima +1 more | 2002-01-22 |