Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557457 | Charged particle beam apparatus | Kosuke Matsumoto, Satoshi Takada, Takashi Nobuhara, Kazuo Aoki | 2023-01-17 |
| 11211226 | Pattern cross-sectional shape estimation system and program | Toshiyuki Yokosuka, Daisuke Bizen, Makoto Suzuki, Yusuke Abe, Kenji Yasui +2 more | 2021-12-28 |
| 11195694 | Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam device | Kosuke Matsumoto, Takashi Nobuhara, Kenji Obara | 2021-12-07 |
| 11164720 | Scanning electron microscope and calculation method for three-dimensional structure depth | Kenji Yasui, Mayuka Osaki, Makoto Suzuki, Toshiyuki Yokosuka, Daisuke Bizen +1 more | 2021-11-02 |
| 9811897 | Defect observation method and defect observation device | Minoru Harada, Yuji Takagi, Ryo Nakagaki, Takehiro Hirai | 2017-11-07 |
| 8859962 | Charged-particle microscope | Noritsugu Takahashi, Muneyuki Fukuda, Manabu Yano, Kazunari Asao, Tomoyasu Shojo | 2014-10-14 |
| 8153970 | Scanning electron microscope | Kazuo Aoki, Mitsugu Sato | 2012-04-10 |
| 7807966 | Scanning electron microscope | Kazuo Aoki, Mitsugu Sato | 2010-10-05 |
| 7442929 | Scanning electron microscope | Kazuo Aoki, Mitsugu Sato | 2008-10-28 |