Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996569 | Measurement device, method and display device | Yuji Takagi, Yasunori Goto | 2021-05-04 |
| 10783625 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Ryo Nakagaki, Yuji Takagi | 2020-09-22 |
| 10720307 | Electron microscope device and inclined hole measurement method using same | Yuji Takagi, Yasunori Goto | 2020-07-21 |
| 10712152 | Overlay error measurement device and computer program | — | 2020-07-14 |
| 10094658 | Overlay measurement method, device, and display device | Yuji Takagi, Yasunori Goto | 2018-10-09 |
| 9858659 | Pattern inspecting and measuring device and program | Tsuyoshi Minakawa, Takashi Hiroi, Takeyuki Yoshida, Taku Ninomiya, Takuma Yamamoto +3 more | 2018-01-02 |
| 9799112 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Ryo Nakagaki, Yuji Takagi | 2017-10-24 |
| 9390885 | Superposition measuring apparatus, superposition measuring method, and superposition measuring system | Takuma Yamamoto, Yasunori Goto | 2016-07-12 |
| 9342878 | Charged particle beam apparatus | Kohei Yamaguchi, Takehiro Hirai | 2016-05-17 |
| 9165356 | Defect inspection method and defect inspection device | Minoru Harada, Atsushi Miyamoto, Takehiro Hirai | 2015-10-20 |
| 8111902 | Method and apparatus for inspecting defects of circuit patterns | Takashi Hiroi, Naoki Hosoya, Hirohito Okuda, Koichi Hayakawa | 2012-02-07 |
| 5845054 | Method and apparatus for determining a correction pattern of periodical unevenness of an apparatus in which optical beams are reflected by a rotating polygonal mirror and scan a recording body | — | 1998-12-01 |