Issued Patents All Time
Showing 25 most recent of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9976966 | Defect inspection method and its device | Yukihiro Shibata, Kei Shimura, Toshifumi Honda | 2018-05-22 |
| 9513228 | Defect inspection method and its device | Yukihiro Shibata, Kei Shimura, Toshifumi Honda | 2016-12-06 |
| 9151719 | Inspection apparatus | Koichi Taniguchi, Kei Shimura | 2015-10-06 |
| 8975582 | Method and apparatus for reviewing defects | Hidetoshi Nishiyama, Toshifumi Honda | 2015-03-10 |
| 8760643 | Apparatus and method for inspecting defect in object surface | Hidetoshi Nishiyama, Minori Noguchi | 2014-06-24 |
| 8748795 | Method for inspecting pattern defect and device for realizing the same | Yuta Urano, Hiroyuki Nakano, Shunji Maeda | 2014-06-10 |
| 8553214 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida | 2013-10-08 |
| 8508727 | Defects inspecting apparatus and defects inspecting method | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2013-08-13 |
| 8482728 | Apparatus and method for inspecting defect on object surface | Hidetoshi Nishiyama, Minori Noguchi | 2013-07-09 |
| 8467048 | Pattern defect inspection apparatus and method | Hidetoshi Nishiyama, Kei Shimura, Minori Noguchi | 2013-06-18 |
| 8462330 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2013-06-11 |
| 8451439 | Apparatus and method for inspecting pattern | Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda, Atsushi Shimoda | 2013-05-28 |
| 8289507 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Taketo Ueno, Hiroyuki Nakano +5 more | 2012-10-16 |
| 8269959 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu | 2012-09-18 |
| 8233145 | Pattern defect inspection apparatus and method | Hidetoshi Nishiyama, Kei Shimura, Minori Noguchi | 2012-07-31 |
| 8228495 | Defects inspecting apparatus and defects inspecting method | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2012-07-24 |
| 8218138 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2012-07-10 |
| 8149395 | Apparatus and method for inspecting pattern | Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda, Atsushi Shimoda | 2012-04-03 |
| 8107065 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2012-01-31 |
| 8094295 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu | 2012-01-10 |
| 8093557 | Method and apparatus for reviewing defects | Hidetoshi Nishiyama, Toshifumi Honda | 2012-01-10 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2011-07-05 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7911601 | Apparatus and method for inspecting pattern | Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda, Atsushi Shimoda | 2011-03-22 |