| 9417262 |
Scanning probe microscope and sample observation method using same |
Toshihiko Nakata |
2016-08-16 |
| 8844061 |
Scanning probe microscope |
Masahiro Watanabe, Toshihiko Nakata, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more |
2014-09-23 |
| 8659761 |
Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light |
Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto |
2014-02-25 |
| 8629985 |
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope |
Toshihiko Nakata, Masahiro Watanabe, Mineo Nomoto |
2014-01-14 |
| 8353060 |
Scanning probe microscope and a measuring method using the same |
Masahiro Watanabe, Toshihiko Nakata |
2013-01-08 |
| 8342008 |
Scanning probe microscope |
Masahiro Watanabe, Toshihiko Nakata, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more |
2013-01-01 |
| 8284406 |
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope |
Toshihiko Nakata, Masahiro Watanabe, Mineo Nomoto |
2012-10-09 |
| 8064066 |
Method and apparatus for measuring displacement of a sample to be inspected using an interference light |
Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto |
2011-11-22 |
| 8011230 |
Scanning probe microscope |
Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Toshihiko Nakata +2 more |
2011-09-06 |
| 7966867 |
Scanning probe microscope |
Masahiro Watanabe, Toshihiko Nakata |
2011-06-28 |
| 7716970 |
Scanning probe microscope and sample observation method using the same |
Masahiro Watanabe, Toshihiko Nakata |
2010-05-18 |
| 7631548 |
Scanning probe microscope |
Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto +2 more |
2009-12-15 |
| 7612889 |
Method and apparatus for measuring displacement of a sample |
Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto |
2009-11-03 |
| 7562564 |
Scanning probe microscope and sample observing method using this and semiconductor device production method |
Toshihiko Nakata, Masahiro Watanabe, Takeshi Arai |
2009-07-21 |