Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417262 | Scanning probe microscope and sample observation method using same | Toshihiko Nakata | 2016-08-16 |
| 8844061 | Scanning probe microscope | Masahiro Watanabe, Toshihiko Nakata, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more | 2014-09-23 |
| 8659761 | Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light | Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto | 2014-02-25 |
| 8629985 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Toshihiko Nakata, Masahiro Watanabe, Mineo Nomoto | 2014-01-14 |
| 8353060 | Scanning probe microscope and a measuring method using the same | Masahiro Watanabe, Toshihiko Nakata | 2013-01-08 |
| 8342008 | Scanning probe microscope | Masahiro Watanabe, Toshihiko Nakata, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more | 2013-01-01 |
| 8284406 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Toshihiko Nakata, Masahiro Watanabe, Mineo Nomoto | 2012-10-09 |
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto | 2011-11-22 |
| 8011230 | Scanning probe microscope | Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Toshihiko Nakata +2 more | 2011-09-06 |
| 7966867 | Scanning probe microscope | Masahiro Watanabe, Toshihiko Nakata | 2011-06-28 |
| 7716970 | Scanning probe microscope and sample observation method using the same | Masahiro Watanabe, Toshihiko Nakata | 2010-05-18 |
| 7631548 | Scanning probe microscope | Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto +2 more | 2009-12-15 |
| 7612889 | Method and apparatus for measuring displacement of a sample | Toshihiko Nakata, Masahiro Watanabe, Yasuhiro Yoshitake, Mineo Nomoto | 2009-11-03 |
| 7562564 | Scanning probe microscope and sample observing method using this and semiconductor device production method | Toshihiko Nakata, Masahiro Watanabe, Takeshi Arai | 2009-07-21 |