Issued Patents All Time
Showing 26–50 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361784 | Method of inspecting a DNA chip and apparatus thereof | Yoshitada Oshida, Tomoaki Sakata, Kenji Yasuda, Satoshi Takahashi | 2013-01-29 |
| 8353060 | Scanning probe microscope and a measuring method using the same | Masahiro Watanabe, Shuichi Baba | 2013-01-08 |
| 8342008 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto +2 more | 2013-01-01 |
| 8284406 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2012-10-09 |
| 8272068 | Scanning probe microscope and sample observing method using the same | Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka | 2012-09-18 |
| 8228495 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2012-07-24 |
| 8181268 | Scanning probe microscope and method of observing sample using the same | Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita +1 more | 2012-05-15 |
| 8149395 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2012-04-03 |
| 8107065 | Method and apparatus for detecting defects | Hiroyuki Nakano, Sachio Uto, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2012-01-31 |
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake, Mineo Nomoto | 2011-11-22 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2011-09-06 |
| 8011230 | Scanning probe microscope | Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Shuichi Baba +2 more | 2011-09-06 |
| 7966867 | Scanning probe microscope | Masahiro Watanabe, Shuichi Baba | 2011-06-28 |
| 7911601 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2011-03-22 |
| 7834353 | Method of manufacturing display device | Mikio Hongo, Sachio Uto, Mineo Nomoto, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2010-11-16 |
| 7791725 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2010-09-07 |
| 7768634 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2010-08-03 |
| 7751037 | Method and apparatus for detecting defects | Hiroyuki Nakano, Sachio Uto, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2010-07-06 |
| 7716970 | Scanning probe microscope and sample observation method using the same | Masahiro Watanabe, Shuichi Baba | 2010-05-18 |
| 7631548 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto +2 more | 2009-12-15 |
| 7612889 | Method and apparatus for measuring displacement of a sample | Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake, Mineo Nomoto | 2009-11-03 |
| 7562564 | Scanning probe microscope and sample observing method using this and semiconductor device production method | Shuichi Baba, Masahiro Watanabe, Takeshi Arai | 2009-07-21 |
| 7528942 | Method and apparatus for detecting defects | Hiroyuki Nakano, Sachio Uto, Akira Hamamatsu, Shunji Maeda, Yuta Urano | 2009-05-05 |
| 7511828 | Three-dimensional shape measuring unit, processing unit, and semiconductor device manufacturing method | Masahiro Watanabe, Maki Tanaka | 2009-03-31 |
| 7456963 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2008-11-25 |