Issued Patents All Time
Showing 76–100 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6778272 | Method of processing a semiconductor device | Hiroyuki Nakano, Masayoshi Serizawa | 2004-08-17 |
| 6765201 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Shunji Maeda | 2004-07-20 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Atsushi Shimoda, Sachio Uto, Minoru Yoshida, Shunji Maeda | 2004-04-13 |
| 6712928 | Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device | Hiroyuki Nakano | 2004-03-30 |
| 6667806 | Process and apparatus for manufacturing semiconductor device | Yasuhiro Yoshitake, Takeshi Kato | 2003-12-23 |
| 6631547 | Manufacturing method for thin film magnetic heads | Minoru Yoshida, Hideaki Sasazawa, Minoru Yamasaka | 2003-10-14 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Hiroaki Shishido, Minoru Yoshida +1 more | 2003-09-16 |
| 6613588 | Floating particle inspection method and its apparatus and a semiconductor device processing apparatus | Hiroyuki Nakano | 2003-09-02 |
| 6576559 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Takanori Ninomiya, Sachio Uto, Hiroyuki Nakano | 2003-06-10 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2003-04-29 |
| 6355570 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Takanori Ninomiya, Sachio Uto, Hiroyuki Nakano | 2002-03-12 |
| 5989928 | Method and device for detecting end point of plasma treatment, method and device for manufacturing semiconductor device, and semiconductor device | Takanori Ninomiya | 1999-11-23 |
| 5781294 | Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen | Takanori Ninomiya, Hilario Haruomi Kobayashi, Kazushi Yoshimura | 1998-07-14 |
| 5656811 | Method for making specimen and apparatus thereof | Fumikazu Itoh, Tohru Ishitani, Akira Shimase, Hiroshi Yamaguchi, Takashi Kamimura | 1997-08-12 |
| 5645351 | Temperature measuring method using thermal expansion and an apparatus for carrying out the same | Shigeki Hirasawa, Yoko Saito, Takanori Ninomiya, Mineo Nomoto | 1997-07-08 |
| 5479259 | Method and apparatus for detecting photoacoustic signal | Takanori Ninomiya, Hilario Haruomi Kobayashi | 1995-12-26 |
| 5377006 | Method and apparatus for detecting photoacoustic signal | — | 1994-12-27 |
| 5333495 | Method and apparatus for processing a minute portion of a specimen | Hiroshi Yamaguchi, Minori Noguchi, Makiko Kohno | 1994-08-02 |
| 5214282 | Method and apparatus for processing a minute portion of a specimen | Hiroshi Yamaguchi, Minori Noguchi, Makiko Kohno | 1993-05-25 |
| 5136172 | Method and apparatus for detecting photoacoustic signal | Yukio Kembo, Tsuguo Sawada, Takehiko Kitamori | 1992-08-04 |
| 5083869 | Photocoustic signal detecting device | Yukio Kembo | 1992-01-28 |
| 5062715 | Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device | Yukio Kembo | 1991-11-05 |
| 5046847 | Method for detecting foreign matter and device for realizing same | Nobuyuki Akiyama, Yoshihiko Yamuchi, Mitsuyoshi Koizumi, Yoshimasa Oshima | 1991-09-10 |
| 4906852 | Projection alignment method and apparatus | Masataka Shiba | 1990-03-06 |
| 4795261 | Reduction projection type aligner | Yoshitada Oshida, Masataka Shiba | 1989-01-03 |