Issued Patents All Time
Showing 101–106 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4788577 | Substrate surface deflecting device | Nobuyuki Akiyama, Asahiro Kuni, Yukio Kembo | 1988-11-29 |
| 4777374 | Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern | Yoshitada Oshida, Masataka Shiba | 1988-10-11 |
| 4744666 | Alignment detection optical system of projection type aligner | Yoshitada Oshida, Naoto Nakashima | 1988-05-17 |
| 4725737 | Alignment method and apparatus for reduction projection type aligner | Masataka Shiba, Yoshitada Oshida, Sachio Uto, Atsuhiro Yoshizaki | 1988-02-16 |
| 4701050 | Semiconductor exposure apparatus and alignment method therefor | Yoshitada Oshida, Masataka Shiba, Naoto Nakashima, Sachio Uto | 1987-10-20 |
| 4668089 | Exposure apparatus and method of aligning exposure mask with workpiece | Yoshitada Oshida, Masataka Shiba, Mitsuyoshi Koizumi, Naoto Nakashima | 1987-05-26 |