Issued Patents All Time
Showing 51–75 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7446866 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2008-11-04 |
| 7417721 | Defect detector and defect detecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2008-08-26 |
| 7355143 | Circuit board production method and its apparatus | Hiroyuki Nakano, Masayoshi Serizawa, Hideaki Sasazawa | 2008-04-08 |
| 7326623 | Method of manufacturing display device | Mikio Hongo, Sachio Uto, Mineo Nomoto, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2008-02-05 |
| 7323684 | Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope | Masahiro Watanabe | 2008-01-29 |
| 7305015 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Shunji Maeda | 2007-12-04 |
| 7271908 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Shunji Maeda | 2007-09-18 |
| 7251024 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2007-07-31 |
| 7217573 | Method of inspecting a DNA chip | Yoshitada Oshida, Tomoaki Sakata, Kenji Yasuda, Satoshi Takahashi | 2007-05-15 |
| 7218389 | Method and apparatus for inspecting pattern defects | Sachio Uto, Minoru Yoshida, Shunji Maeda | 2007-05-15 |
| 7175875 | Method and apparatus for plasma processing | Hiroyuki Nakano | 2007-02-13 |
| 7132669 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2006-11-07 |
| 7129124 | Display device, process of fabricating same, and apparatus for fabricating same | Mikio Hongo, Sachio Uto, Mineo Nomoto, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2006-10-31 |
| 7081953 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2006-07-25 |
| 7067806 | Scanning probe microscope and specimen observation method | Masahiro Watanabe | 2006-06-27 |
| 6943086 | Laser annealing apparatus, TFT device and annealing method of the same | Mikio Hongo, Sachio Uto, Mineo Nomoto, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2005-09-13 |
| 6943876 | Method and apparatus for detecting pattern defects | Minoru Yoshida, Sachio Uto, Shunji Maeda | 2005-09-13 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6897956 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Shunji Maeda | 2005-05-24 |
| 6877365 | Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope | Masahiro Watanabe | 2005-04-12 |
| 6831277 | Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor | Hideaki Sasazawa, Kenji Furusawa, Minako Morisato, Hideo Yamakura, Toshio Tamura | 2004-12-14 |
| 6831737 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2004-12-14 |
| 6825437 | Apparatus enabling particle detection utilizing wide view lens | Hiroyuki Nakano, Takeshi Arai | 2004-11-30 |
| 6819416 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2004-11-16 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2004-10-05 |