Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8411928 | Scatterometry method and device for inspecting patterned medium | Hideaki Sasazawa, Takenori Hirose, Minoru Yoshida, Shigeru Serikawa | 2013-04-02 |
| 8260029 | Pattern shape inspection method and apparatus thereof | Hideaki Sasazawa, Takenori Hirose | 2012-09-04 |
| 8045146 | Method and apparatus for reviewing defect | Yasuhiro Yoshitake, Shunichi Matsumoto, Hidetoshi Nishiyama | 2011-10-25 |
| 8040772 | Method and apparatus for inspecting a pattern shape | Takenori Hirose, Hideaki Sasazawa | 2011-10-18 |
| 7599076 | Method for optically detecting height of a specimen and charged particle beam apparatus using the same | Masahiro Watanabe, Yasuhiro Yoshitake | 2009-10-06 |
| 7119908 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Mineo Nomoto, Takenori Hirose | 2006-10-10 |
| 7057744 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Mineo Nomoto, Takenori Hirose | 2006-06-06 |
| 5824598 | IC wiring connecting method using focused energy beams | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Akira Shimase, Satoshi Haraichi +1 more | 1998-10-20 |
| 5497034 | IC wiring connecting method and apparatus | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Akira Shimase, Satoshi Haraichi +1 more | 1996-03-05 |
| 5472507 | IC wiring connecting method and apparatus | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Akira Shimase, Satoshi Haraichi +1 more | 1995-12-05 |
| 5116782 | Method and apparatus for processing a fine pattern | Hiroshi Yamaguchi, Tateoki Miyauchi | 1992-05-26 |
| 5113072 | Device having superlattice structure, and method of and apparatus for manufacturing the same | Hiroshi Yamaguchi, Fumikazu Itoh, Koji Ishida, Shinji Sakano, Masao Tamura +3 more | 1992-05-12 |
| 4983540 | Method of manufacturing devices having superlattice structures | Hiroshi Yamaguchi, Fumikazu Itoh, Koji Ishida, Shinji Sakano, Masao Tamura +3 more | 1991-01-08 |
| 4933565 | Method and apparatus for correcting defects of X-ray mask | Hiroshi Yamaguchi, Mitsuyoshi Koizumi, Akira Shimase, Satoshi Haraichi, Tateoki Miyauchi +2 more | 1990-06-12 |
| 4925755 | Method of correcting defect in circuit pattern | Hiroshi Yamaguchi, Akira Shimase, Satoshi Haraichi, Susumu Aiuchi, Nobuyuki Akiyama +2 more | 1990-05-15 |
| 4868068 | IC wiring connecting method and resulting article | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Akira Shimase, Satoshi Haraichi +1 more | 1989-09-19 |
| 4700225 | Method and apparatus for testing pattern of a printed circuit board | Yasuhiko Hara, Koichi Karasaki, Akira Sase | 1987-10-13 |
| 4654583 | Method and apparatus for detecting defects of printed circuit patterns | Takanori Ninomiya, Yasuo Nakagawa | 1987-03-31 |