Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7945410 | Semiconductor device yield prediction system and method | Seiji Ishikawa, Katsumi Ikegaya, Yasunori Yamaguchi, Kazuo Ito, Yuichi Hamamura | 2011-05-17 |
| 7601240 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2009-10-13 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka +1 more | 2005-07-12 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2005-04-19 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2004-05-11 |
| 6611728 | Inspection system and method for manufacturing electronic devices using the inspection system | Hisafumi Iwata, Junko Konishi, Yoko Ikeda, Kazunori Nemoto, Makoto Ono +1 more | 2003-08-26 |