Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656811 | Method for making specimen and apparatus thereof | Fumikazu Itoh, Toshihiko Nakata, Tohru Ishitani, Hiroshi Yamaguchi, Takashi Kamimura | 1997-08-12 |
| 5583344 | Process method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Takashi Kamimura, Fumikazu Itoh +3 more | 1996-12-10 |
| 5504340 | Process method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Takashi Kamimura, Fumikazu Itoh +3 more | 1996-04-02 |
| 5497034 | IC wiring connecting method and apparatus | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Satoshi Haraichi, Takahiko Takahashi +1 more | 1996-03-05 |
| 5472507 | IC wiring connecting method and apparatus | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Satoshi Haraichi, Takahiko Takahashi +1 more | 1995-12-05 |
| 5447614 | Method of processing a sample using a charged beam and reactive gases and system employing the same | Yuuichi Hamamura, Satoshi Haraichi, Junzou Azuma, Fumikazu Itoh, Toshio Yamada +2 more | 1995-09-05 |
| 5439763 | Optical mask and method of correcting the same | Junzou Azuma, Satoshi Haraichi, Fumikazu Itoh, Yasuhiro Koizumi | 1995-08-08 |
| 5358806 | Phase shift mask, method of correcting the same and apparatus for carrying out the method | Satoshi Haraichi, Fumikazu Itoh, Hiroshi Yamaguchi, Junzou Azuma, Yasuhiro Koizumi | 1994-10-25 |
| 5342448 | Apparatus for processing a sample using a charged beam and reactive gases | Yuuichi Hamamura, Satoshi Haraichi, Junzou Azuma, Fumikazu Itoh, Toshio Yamada +2 more | 1994-08-30 |
| 5229607 | Combination apparatus having a scanning electron microscope therein | Hironobu Matsui, Mikio Ichihashi, Sumio Hosaka, Yoshinori Nakayama, Satoshi Haraichi +9 more | 1993-07-20 |
| 5223109 | Ion beam processing method and apparatus | Fumikazu Itoh, Satoshi Haraichi, Junzou Azuma | 1993-06-29 |
| 5086015 | Method of etching a semiconductor device by an ion beam | Fumikazu Itoh, Satoshi Haraichi, Takahiko Takahashi, Mikio Hongo | 1992-02-04 |
| 5055696 | Multilayered device micro etching method and system | Satoshi Haraichi, Fumikazu Itoh, Takahiko Takahashi | 1991-10-08 |
| 5026664 | Method of providing a semiconductor IC device with an additional conduction path | Mikio Hongo, Katsuro Mizukoshi, Shuzo Sano, Takashi Kamimura, Fumikazu Itoh +2 more | 1991-06-25 |
| 4933565 | Method and apparatus for correcting defects of X-ray mask | Hiroshi Yamaguchi, Keiya Saito, Mitsuyoshi Koizumi, Satoshi Haraichi, Tateoki Miyauchi +2 more | 1990-06-12 |
| 4925755 | Method of correcting defect in circuit pattern | Hiroshi Yamaguchi, Keiya Saito, Satoshi Haraichi, Susumu Aiuchi, Nobuyuki Akiyama +2 more | 1990-05-15 |
| RE33193 | Ion beam processing apparatus and method of correcting mask defects | Hiroshi Yamaguchi, Tateoki Miyauchi, Mikio Hongo | 1990-04-03 |
| 4900695 | Semiconductor integrated circuit device and process for producing the same | Takahiko Takahashi, Funikazu Itoh, Hiroshi Yamaguchi, Mikio Hongo, Satoshi Haraichi | 1990-02-13 |
| 4868068 | IC wiring connecting method and resulting article | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Satoshi Haraichi, Takahiko Takahashi +1 more | 1989-09-19 |
| 4687939 | Method and apparatus for forming film by ion beam | Tateoki Miyauchi, Hiroshi Yamaguchi, Mikio Hongo, Katsuro Mizukoshi, Ryohei Satoh | 1987-08-18 |
| 4683378 | Apparatus for ion beam work | Hiroshi Yamaguchi, Satoshi Haraichi, Tateoki Miyauchi | 1987-07-28 |
| 4609809 | Method and apparatus for correcting delicate wiring of IC device | Hiroshi Yamaguchi, Tateoki Miyauchi, Mikio Hongo | 1986-09-02 |
| 4567398 | Liquid metal ion source | Tohru Ishitani, Hifumi Tamura | 1986-01-28 |
| 4566765 | Apparatus for summing several ring-shape laser beams | Tateoki Miyauchi, Mikio Hongo, Katsuro Mizukoshi, Hiroshi Yamaguchi | 1986-01-28 |
| 4560907 | Ion source | Hifumi Tamura, Hiroshi Okano, Tohru Ishitani | 1985-12-24 |