Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4503329 | Ion beam processing apparatus and method of correcting mask defects | Hiroshi Yamaguchi, Tateoki Miyauchi, Mikio Hongo | 1985-03-05 |
| 4479060 | Apparatus for irradiation with charged particle beams | Hifumi Tamura, Tohru Ishitani | 1984-10-23 |