Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8669535 | Electron gun | Takashi Onishi, Shunichi Watanabe, Keiji Tamura | 2014-03-11 |
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2013-12-10 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2012-03-13 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2008-10-21 |
| 7385198 | Method and apparatus for measuring the physical properties of micro region | Yoshifumi Taniguchi, Masanari Kouguchi | 2008-06-10 |
| 7351944 | Beam irradiation device | Masato Yamada, Hitoshi Terasaki, Yoichi Tsuchiya, Shuichi Ichiura, Masahiro Higuchi +2 more | 2008-04-01 |
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2007-06-19 |
| 7022988 | Method and apparatus for measuring physical properties of micro region | Yoshifumi Taniguchi, Masanari Kouguchi | 2006-04-04 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-01-17 |
| 6822233 | Method and apparatus for scanning transmission electron microscopy | Kuniyasu Nakamura, Hiroshi Kakibayashi, Shigeto Isakozawa, Yuji Sato, Takahito Hashimoto | 2004-11-23 |
| 6750451 | Observation apparatus and observation method using an electron beam | Masanari Koguchi, Kuniyasu Nakamura, Kaoru Umemura, Yoshifumi Taniguchi | 2004-06-15 |
| 6531697 | Method and apparatus for scanning transmission electron microscopy | Kuniyasu Nakamura, Hiroshi Kakibayashi, Shigeto Isakozawa, Yuji Sato, Takahito Hashimoto | 2003-03-11 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 6051834 | Electron microscope | Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Masanari Koguchi +7 more | 2000-04-18 |
| 5866905 | Electron microscope | Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Todokoro, Katsuhiro Kuroda, Masanari Koguchi +7 more | 1999-02-02 |
| 5813776 | Printing method and printing apparatus using split seal paper sheets | Susumu Fujiwara, Toshiyuki Watanabe, Yoshiaki Ishikawa, Shigeki Shibuya, Nobuo Iwatsuki | 1998-09-29 |
| 5783830 | Sample evaluation/process observation system and method | Hiroshi Hirose, Hidemi Koike, Shigeto Isakozawa, Yuji Sato, Motohide Ukiana | 1998-07-21 |
| 5552602 | Electron microscope | Hiroshi Kakibayashi, Yasuhiro Mitsui, Hideo Tadokoro, Katsuhiro Kuroda, Masanari Koguchi +3 more | 1996-09-03 |
| 5442182 | Electron lens | Toshiro Kubo, Toshiyuki Ohashi, Yuji Sato | 1995-08-15 |
| 5442183 | Charged particle beam apparatus including means for maintaining a vacuum seal | Hironobu Matsui, Shinjiroo Ueda, Tadashi Otaka, Kazue Takahashi, Toshiaki Kobari +1 more | 1995-08-15 |
| 5373158 | Field-emission transmission electron microscope and operation method thereof | Hisaya Murakoshi | 1994-12-13 |
| 5324950 | Charged particle beam apparatus | Tadashi Otaka | 1994-06-28 |