Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5254856 | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems | Hironobu Matsui, Shinjiroo Ueda, Tadashi Otaka, Kazue Takahashi, Toshiaki Kobari +1 more | 1993-10-19 |
| 5229607 | Combination apparatus having a scanning electron microscope therein | Hironobu Matsui, Sumio Hosaka, Yoshinori Nakayama, Satoshi Haraichi, Fumikazu Itoh +9 more | 1993-07-20 |
| 5187371 | Charged particle beam apparatus | Hironobu Matsui | 1993-02-16 |
| 5153434 | Electron microscope and method for observing microscopic image | Yusuke Yajima, Masakazu Ichikawa, Ryo Suzuki, Masatoshi Takeshita | 1992-10-06 |
| 5134289 | Field emission electron device which produces a constant beam current | Hisaya Murakoshi, Shigeto Isakozawa, Yuji Sato | 1992-07-28 |
| 4772821 | Apparatus for introducing oxygen gas | Shigeyuki Hosoki, Keiji Takata, Hiroyasu Kaga | 1988-09-20 |
| 4767926 | Electron beam metrology system | Hisaya Murakoshi, Kenichi Yamamoto | 1988-08-30 |
| 4751384 | Electron beam metrology system | Hisaya Murakoshi, Hideo Todokoro | 1988-06-14 |
| 4740693 | Electron beam pattern line width measurement system | Yoshinori Nakayama, Shinji Okazaki, Hidehito Obayashi | 1988-04-26 |
| 4670652 | Charged particle beam microprobe apparatus | Masahide Okumura, Satoru Fukuhara | 1987-06-02 |
| 4605860 | Apparatus for focusing a charged particle beam onto a specimen | Satoru Fukuhara, Hisaya Murakoshi, Shigemitsu Seitoh | 1986-08-12 |
| 4600839 | Small-dimension measurement system by scanning electron beam | Satoru Fukuhara, Masahide Okumura, Hisaya Murakoshi | 1986-07-15 |