Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8604430 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2013-12-10 |
| 8134125 | Method and apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2012-03-13 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2008-10-21 |
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2007-06-19 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-01-17 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 5838096 | Cathode having a reservoir and method of manufacturing the same | Hiroyuki Shinada, Katsuhiro Kuroda | 1998-11-17 |
| 5834781 | Electron source and electron beam-emitting apparatus equipped with same | — | 1998-11-10 |
| 5616926 | Schottky emission cathode and a method of stabilizing the same | Hiroyuki Shinada, Shingo Kimura, Katsuhiro Kuroda, Takashi Ohshima | 1997-04-01 |
| 5608218 | Scanning electron microscope | Mitsugu Sato, Yoichi Ose, Hideo Todokoro, Makoto Ezumi | 1997-03-04 |
| 5162240 | Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate | Norio Saitou, Hideo Todokoro, Katsuhiro Kuroda, Genya Matsuoka, Hideo Arima +3 more | 1992-11-10 |
| 5160884 | Charged particle beam device | Hideo Todokoro, Hiroyuki Shinada | 1992-11-03 |
| 5111141 | Magnetic field measurement optimization apparatus using a charged particle beam | Hiroyuki Shinada, Shigemitsu Seitoh | 1992-05-05 |
| 5093616 | Voltage measurement method using electron beam | Shigemitsu Seitoh, Hideo Todokoro, Hiroyuki Shinada | 1992-03-03 |
| 4868394 | Charged particle detector | Hiroyuki Shinada, Hideo Todokoro | 1989-09-19 |
| 4841191 | Piezoelectric actuator control apparatus | Keiji Takada, Masahide Okumura, Toshiyuki Morimura, Sumio Hosaka, Shigeyuki Hosoki | 1989-06-20 |
| 4803430 | Magnetic/electric field measuring device by means of an electron beam | Hiroyuki Shinada, Hideo Todokoro | 1989-02-07 |
| 4687931 | Scanning electron microscope | Hideo Todokoro | 1987-08-18 |
| 4670652 | Charged particle beam microprobe apparatus | Mikio Ichihashi, Masahide Okumura | 1987-06-02 |
| 4629889 | Potential analyzer | Hideo Todokoro | 1986-12-16 |
| 4605860 | Apparatus for focusing a charged particle beam onto a specimen | Mikio Ichihashi, Hisaya Murakoshi, Shigemitsu Seitoh | 1986-08-12 |
| 4600839 | Small-dimension measurement system by scanning electron beam | Mikio Ichihashi, Masahide Okumura, Hisaya Murakoshi | 1986-07-15 |