Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094744 | Method for producing sheetlike detergent | Hideo Kobayashi, Masaki Sakamoto, Hironobu Kawajiri, Keiichi Onoda, Masayasu Sato +1 more | 2006-08-22 |
| 6881441 | Method for intermittently forming laid layers | Hideo Kobayashi, Masaki Sakamoto, Hironobu Kawajiri | 2005-04-19 |
| 6583431 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-06-24 |
| 6555833 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-04-29 |
| 6509572 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-01-21 |
| 6441383 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2002-08-27 |
| 6403973 | Electron beam exposure method and apparatus and semiconductor device manufactured using the same | Hiroyuki Takahashi, Koji Nagata, Kimiaki Ando | 2002-06-11 |
| 6329665 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2001-12-11 |
| 6320198 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2001-11-20 |
| 6262428 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2001-07-17 |
| 6159644 | Method of fabricating semiconductor circuit devices utilizing multiple exposures | Hidetoshi Satoh, Yoshinori Nakayama, Hiroya Ohta, Norio Saitou | 2000-12-12 |
| 6121625 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2000-09-19 |
| 5650631 | Electron beam writing system | Yasunari Sohda, Yasuhiro Someda, Hidetoshi Satoh, Yoshinori Nakayama, Norio Saitou | 1997-07-22 |
| 5424550 | Charged particle beam exposure apparatus | Masamichi Kawano, Haruo Yoda, Yukinobu Shibata, Tadao Konishi | 1995-06-13 |
| 5402863 | Apparatus to automatically adjust spring tension of an elevator brake to maintain brake torque | Shigemi Iwata, Hiroyuki Ikejima | 1995-04-04 |
| 5281827 | Charged particle beam exposure apparatus | Masamichi Kawano, Haruo Yoda, Yukinobu Shibata, Tadao Konishi | 1994-01-25 |
| 5050709 | Elevator control apparatus | Shigemi Iwata | 1991-09-24 |
| 4841191 | Piezoelectric actuator control apparatus | Keiji Takada, Satoru Fukuhara, Toshiyuki Morimura, Sumio Hosaka, Shigeyuki Hosoki | 1989-06-20 |
| 4829444 | Charged particle beam lithography system | Norio Saitou, Tsutomu Komoda, Mitsuo Ooyama | 1989-05-09 |
| 4808829 | Mark position detection system for use in charged particle beam apparatus | Takashi Matsuzaka, Genya Matsuoka, Kazumi Iwadate, Tadahito Matsuda, Ryoichi Yamaguchi | 1989-02-28 |
| 4701620 | Electron beam exposure apparatus | Takashi Matsuzaka, Genya Matsuoka, Norio Saitou | 1987-10-20 |
| 4692579 | Electron beam lithography apparatus | Norio Saitou, Susumu Ozasa, Mitsuo Ooyama, Tsutomu Komoda, Katsuhiro Harada +2 more | 1987-09-08 |
| 4670652 | Charged particle beam microprobe apparatus | Mikio Ichihashi, Satoru Fukuhara | 1987-06-02 |
| 4600839 | Small-dimension measurement system by scanning electron beam | Mikio Ichihashi, Satoru Fukuhara, Hisaya Murakoshi | 1986-07-15 |
| 4437008 | Electron beam control system | Tadahito Matsuda, Hisatake Yokouchi, Susumu Ozasa, Yasuo Kato | 1984-03-13 |